Mikro-/Nanoelectronics based on Silicium

National programme for mikro- and nanoelectronics with a separate focus on nanotechnology
- Intensification of the collaboration between business and science in order to transform research results into marketable products rapidly.
- Early participation of small and medium-sized companies in the research programmes.
- The flexibilization of the German system of scientific study and research by way of additional development of its structures in order to maximize the effect of the research funds used.
New processes for structuring nano-components; optical lithography based on 157 nm UV-laser light; development of mask-technology for nano-lithography; extrem UV
Funding rate 50 %; cooperation between research institutions and industry essential