Objective
Scanning electron microscopy (SEM) is a cornerstone of semiconductor metrology and inspection, yet it faces a fundamental limitation: it can only image static device structures. Modern semiconductor devices operate at multi-GHz frequencies, and their electrical functionality is typically characterized separately and late in the fabrication chain. This separation complicates the localization of dynamic failure modes and slows the feedback loop between device design and manufacturing. While attempts to introduce time resolution into electron microscopy have been made in academic research, no current technique enables real-time imaging of GHz device operation in a commercial SEM.
Building on advances from our ERC Starting Grant ATTIDA, we propose SEMI-PULSER, a new technique that enables active, in-operando electron-beam metrology in conventional SEM platforms. SEMI-PULSER uses optical modulation of a continuous-wave laser to generate synchronized electron pulses that are phase-locked to the operating frequency of a device under inspection, enabling stroboscopic imaging of time-dependent electric potentials with nanometer spatial resolution and picosecond temporal resolution.
Our Proof-of-Concept project will demonstrate synchronized electron pulse generation in a commercial SEM, validate dynamic voltage contrast imaging on RF test structures and semiconductor devices, and develop a compact module architecture suitable for integration into existing SEM systems. By enabling direct visualization of semiconductor device operation in real time, SEMI-PULSER will introduce a new diagnostic capability for semiconductor metrology, with potential applications in failure analysis, high-frequency electronics, and next generation communication devices.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences physical sciences optics microscopy electron microscopy
- natural sciences physical sciences electromagnetism and electronics semiconductivity
- natural sciences physical sciences optics laser physics
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
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HORIZON.1.1 - European Research Council (ERC)
MAIN PROGRAMME
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Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
HORIZON-ERC-POC - HORIZON ERC Proof of Concept Grants
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Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
(opens in new window) ERC-2026-POC
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Net EU financial contribution. The sum of money that the participant receives, deducted by the EU contribution to its linked third party. It considers the distribution of the EU financial contribution between direct beneficiaries of the project and other types of participants, like third-party participants.
32000 Haifa
Israel
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.