High epsilon materials cluster tool for optimised rapid deposition of stacked capacitors on 300 mm wafers

Programme(s)

• FP4-ESPRIT 4 - Specific research and technological development programme in the field of information technologies, 1994-1998

Topic(s)

• 2.8 - Semiconductors - Building blocks, methods & tools

Call for proposal

Data not available

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

SIEMENS AKTIENGESELLSCHAFT

Address

Wittelsbacherplatz 2
80333 Muenchen
Germany

Participants (8)

AIXTRON AG

Germany

Address

Kackertstrasse 15-17
Aachen

Links

Asm International Nv

Netherlands

Address

Jan Van Eycklaan 10
3723 BC Bilthoven

Austria Mikro Systeme International Ag

Austria

Address

Tobelbaderstrasse (Schloss Premstaetten) 30
8141 Unterpremstaetten

Forschungszentrum Juelich

Germany

Address

Wilhelm-johnen Str.
52425 Juelich

Fraunhofer Gesellschaft Zur Foerderung der Angewandten Forschung

Germany

Address

Leonrodstr. 54
80636 München

Lucent Technologies Microelectronica , SA Unipersonal

Spain

Address

Poligono Industrial Tres Cantos (Zona Oeste)
28760 Tres Cantos (Madrid)

Motorola Limited

United Kingdom

Address

Jays Close, Viable Industrial Estate
RG22 4PD Basingstoke

Steag-Ast Elektronik Gmbh

Germany

Address

Benzstrasse 1
85551 Kirchheim