CORDIS - EU research results
CORDIS
Content archived on 2024-05-14

High epsilon materials cluster tool for optimised rapid deposition of stacked capacitors on 300 mm wafers

Call for proposal

Data not available

Coordinator

SIEMENS AKTIENGESELLSCHAFT
EU contribution
No data
Address
WITTELSBACHERPLATZ 2
80333 MUENCHEN
Germany

See on map

Total cost
No data

Participants (8)