High epsilon materials cluster tool for optimised rapid deposition of stacked capacitors on 300 mm wafers

Project Information

HECTOR 300

Grant agreement ID: 26381

Project closed

Start date 1 March 1998

End date 30 June 2000

Funded under

• Specific research and technological development programme in the field of information technologies, 1994-1998

Total cost € 10 000 000,00

EU contribution € 5 000 000,00

Coordinated by

SIEMENS AKTIENGESELLSCHAFT
Germany

Programme(s)

• FP4-ESPRIT 4 - Specific research and technological development programme in the field of information technologies, 1994-1998

Topic(s)

• 2.8 - Semiconductors - Building blocks, methods & tools

Call for proposal

Data not available

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

SIEMENS AKTIENGESELLSCHAFT

• EU contribution: No data
• Address: WITTELSBACHERPLATZ 2 ; 80333 MUENCHEN ; Germany
• Total cost: No data

Participants (8)

AIXTRON AG

Germany

• EU contribution: No data
• Address: Kackertstrasse 15-17 ; AACHEN
• Total cost: No data

Asm International Nv

Netherlands

• EU contribution: No data
• Address: Jan Van Eycklaan 10 ; 3723 BC Bilthoven
• Total cost: No data

Austria Mikro Systeme International Ag

Austria

• EU contribution: No data
• Address: Tobelbaderstrasse (Schloss Premstaetten) 30 ; 8141 Unterpremstaetten
• Total cost: No data

Forschungszentrum Juelich

Germany

• EU contribution: No data
• Address: Wilhelm-Johnen Str. ; 52425 Juelich
• Total cost: No data

Fraunhofer Gesellschaft Zur Foerderung der Angewandten Forschung

Germany

• EU contribution: No data
• Address: Leonrodstr. 54 ; 80636 München
• Total cost: No data

Lucent Technologies Microelectronica , SA Unipersonal

Spain

• EU contribution: No data
• Address: Poligono Industrial Tres Cantos (Zona Oeste) ; 28760 Tres Cantos (Madrid)
• Total cost: No data

Motorola Limited

United Kingdom

• EU contribution: No data
• Address: Jays Close, Viable Industrial Estate ; RG22 4PD Basingstoke
• Total cost: No data

Steag-Ast Elektronik Gmbh

Germany

• EU contribution: No data
• Address: Benzstrasse 1 ; 85551 Kirchheim
• Total cost: No data