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High epsilon materials cluster tool for optimised rapid deposition of stacked capacitors on 300 mm wafers

Funding Scheme

CSC - Cost-sharing contracts

Coordinator

SIEMENS AKTIENGESELLSCHAFT
Address
Wittelsbacherplatz 2
80333 Muenchen
Germany

Participants (8)

AIXTRON AG
Germany
Address
Kackertstrasse 15-17
Aachen
Asm International Nv
Netherlands
Address
Jan Van Eycklaan 10
3723 BC Bilthoven
Austria Mikro Systeme International Ag
Austria
Address
Tobelbaderstrasse (Schloss Premstaetten) 30
8141 Unterpremstaetten
Forschungszentrum Juelich
Germany
Address
Wilhelm-johnen Str.
52425 Juelich
Fraunhofer Gesellschaft Zur Foerderung der Angewandten Forschung
Germany
Address
Leonrodstr. 54
80636 München
Lucent Technologies Microelectronica , SA Unipersonal
Spain
Address
Poligono Industrial Tres Cantos (Zona Oeste)
28760 Tres Cantos (Madrid)
Motorola Limited
United Kingdom
Address
Jays Close, Viable Industrial Estate
RG22 4PD Basingstoke
Steag-Ast Elektronik Gmbh
Germany
Address
Benzstrasse 1
85551 Kirchheim