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European 450mm Equipment Demo Line

Objective

The aim of the E450EDL project is to continue the engagement of the European semiconductor equipment and materials industry in the 450mm wafer size transition that started with the ENIAC JU EEMI450 initiative and proceeded with subsequent projects funded with public money, amongst others NGC450, SOI450, EEM450PR. The demo line resulting from this project will be such that it will enable first critical process module development by combining imec infrastructure with tools remaining at the site of the manufacturers (distributed pilot line). Multi-site processing will allow partners to participate in the world first 450mm integration studies and will be enabled by the controlled exchange of 450mm wafers between different sites.
The consortium comprises 43 members (from 11 different European countries) with many SMEs and research institutes. The project is organized in five technical work packages and a work package on management and coordination.
In the work package on integration and wafer processing first critical modules will be developed and will demonstrate the feasibility of processing on 450mm wafers.
The main objective in the work package on lithography is to develop a wafer stage test-rig, which can be implemented into the pilot line system.
In the work package on front end equipment several tools will be developed such as a plasma ion implant module, a plasma dry etch module, a RTP system and a single wafer cleaning system.
Furthermore, in the dedicated work package on metrology 450mm metrology tool types will be developed for amongst others dielectric film thickness and composition measurements, defect inspection, defect review and analysis, optical critical dimensions (CD), overlay (mask and wafer) and 3D metrology.
Finally, from the work package on wafer handling and automation a set of equipment will be provided to support the demo line operations, and facilitate the R&D dedicated to process and metrology modules.

Field of science

  • /humanities/arts/modern and contemporary art/film
  • /social sciences/sociology/industrial relations/automation
  • /natural sciences/physical sciences/electromagnetism and electronics/electrical conductivity/semiconductor

Call for proposal

ENIAC-2012-2
See other projects for this call

Funding Scheme

JTI-CP-ENIAC - Joint Technology Initiatives - Collaborative Project (ENIAC)

Coordinator

ASML NETHERLANDS B.V.
Address
De Run 6501
5504DR Veldhoven
Netherlands
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 7 500 000
Administrative Contact

Participants (41)

PFEIFFER VACUUM
France
EU contribution
€ 453 571
Address
98 Avenue De Brogny
74000 Annecy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
AIS AUTOMATION DRESDEN GmbH
Germany
EU contribution
€ 132 015
Address
Otto-mohr Strasse 6
01237 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
APPLIED MATERIALS ISRAEL LTD
Israel
EU contribution
€ 4 494 180
Address
Oppenheimer Street 9
76705 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ARTEMIS CONTROL AG
Switzerland
EU contribution
€ 81 468
Address
Seestrasse 147
8610 Uster
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ASM BELGIUM NV
Belgium
EU contribution
€ 249 172
Address
Kapeldreef 75
3001 Heverlee
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ASYS GmbH & Co. KG
Germany
EU contribution
€ 35 606
Address
Gottlob-bauknecht-str. 4
73614 Schorndorf
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
France
EU contribution
€ 162 793
Address
Rue Leblanc 25
75015 Paris 15
Activity type
Research Organisations
Administrative Contact
DEMCON ADVANCED MECHATRONICS ENSCHEDE B.V.
Netherlands
EU contribution
€ 161 737
Address
Institutenweg 25
7521 PH Enschede
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Entegris Cleaning Process (ECP) SAS
France
EU contribution
€ 67 841
Address
Rue Du Rocher De Lorzier 196
38430 Moirans
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
EV GROUP E. THALLNER GMBH
Austria
EU contribution
€ 449 121
Address
Di Erich Thallner Strasse 1
4782 St Florian Am Inn
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
FEI Czech Republic, s.r.o.
Czechia
EU contribution
€ 100 500
Address
Podnikatelska 6
612 00 Brno
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
FEI ELECTRON OPTICS BV
Netherlands
EU contribution
€ 690 600
Address
Achtseweg Noord Gebouw Aae 5
5651 GG Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Fries Research & Technology GmbH
Germany
EU contribution
€ 63 000
Address
Friedrich-ebert-straße
51429 Bergisch Gladbach
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ION BEAM SERVICES
France
EU contribution
€ 764 772
Address
Rue Gaston Imbert Prolongee
13790 Rousset
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Integrated Dynamics Engineering GmbH
Germany
EU contribution
€ 165 000
Address
Karl-liebknecht-strasse 30
65479 Raunheim
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 5 982 077
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
Administrative Contact
INTEL RESEARCH AND INNOVATION IRELAND LIMITED
Ireland
EU contribution
€ 438 000
Address
Collinstown Industrial Estate
. Leixlip Kildare
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Institute of Scientific Instruments of the ASCR, v.v.i.
Czechia
EU contribution
€ 15 000
Address
Kralovopolska 147
61264 Brno
Activity type
Research Organisations
Administrative Contact
BRUKER TECHNOLOGIES LTD
Israel
EU contribution
€ 709 446
Address
6 Hamechkar Street Ramat Gavriel Industrial Zone
2306990 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
KLA-TENCOR CORPORATION (ISRAEL)
Israel
EU contribution
€ 709 519
Address
Hatikshoret St.
23100 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
LAM RESEARCH AG
Austria
EU contribution
€ 810 864
Address
Sez-strasse 1
9500 Villach
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Levitech B.V.
Netherlands
EU contribution
€ 244 800
Address
Versterkerstraat 10
1322 AP Almere
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
M+W GERMANY GMBH
Germany
EU contribution
€ 60 000
Address
Lotterbergstrasse 30
70499 Stuttgart
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Metryx Ltd
United Kingdom
EU contribution
€ 286 844
Address
Unit 2 A, Manor Park, Nailsea Wall Lane
BS48 4DD Nailsea
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
TERMESZETTUDOMANYI KUTATOKOZPONT
Hungary
EU contribution
€ 59 250
Address
Magyar Tudosok Korutja 2
1117 Budapest
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Mogema B.V.
Netherlands
EU contribution
€ 405 000
Address
Industrieweg 9
8084 ZG 'T Harde
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Nanoplas
France
EU contribution
€ 559 507
Address
Centre Scientifique Bp01 - Bât 503 503
91401 Orsay
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
NOVA MEASURING INSTRUMENTS LTD
Israel
EU contribution
€ 654 000
Address
Weizmann Science Park Building 22
76100 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
PRODRIVE TECHNOLOGIES BV
Netherlands
EU contribution
€ 606 188
Address
Science Park Eindhoven 5501
5692 EM Son
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
RECIF TECHNOLOGIES
France
EU contribution
€ 142 958
Address
Rue Des Briquetiers 9
31700 Blagnac
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
REDEN B.V.
Netherlands
EU contribution
€ 135 000
Address
F Hazemeijerstraat 800
7555 RJ Hengelo Ov
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
RIBER SA
France
EU contribution
€ 133 021
Address
Rue Casimir Perier 31
95873 Bezons
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
SEMILAB FELVEZETO FIZIKAI LABORATORIUM RESZVENYTARSASAG
Hungary
EU contribution
€ 129 675
Address
Prielle Kornelia Utca 4/A.
1117 Budapest
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
SemiLev GmbH
Germany
EU contribution
€ 23 250
Address
Industriering 7
63868 Grossewallstadt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
SOITEC SA
France
EU contribution
€ 131 775
Address
Chemin Des Franques - Parc Technologique Des Fontaines
38190 Bernin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
SUSS MicroTec
Germany
EU contribution
€ 1 756 200
Address
Schleissheimerstrasse 90
85748 Garching
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Netherlands
EU contribution
€ 656 204
Address
Anna Van Buerenplein 1
2595 DA Den Haag
Activity type
Research Organisations
Administrative Contact
TECHNISCHE UNIVERSITEIT DELFT
Netherlands
EU contribution
€ 175 155
Address
Stevinweg 1
2628 CN Delft
Activity type
Higher or Secondary Education Establishments
Administrative Contact
VDL ENABLING TECHNOLOGIES GROUP EINDHOVEN BV
Netherlands
EU contribution
€ 375 000
Address
Achtseweg Noord 5 Ak-1 K113
5651 GG Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
XYCARB CERAMICS BV
Netherlands
EU contribution
€ 50 777
Address
Zuiddijk 4
5705 CS Helmond
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
CARL ZEISS SMT AG
Germany
EU contribution
€ 37 500
Address
Carl-zeiss-strasse 22
D-73447 Oberkochen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact