Obiettivo
The aim of the E450EDL project is to continue the engagement of the European semiconductor equipment and materials industry in the 450mm wafer size transition that started with the ENIAC JU EEMI450 initiative and proceeded with subsequent projects funded with public money, amongst others NGC450, SOI450, EEM450PR. The demo line resulting from this project will be such that it will enable first critical process module development by combining imec infrastructure with tools remaining at the site of the manufacturers (distributed pilot line). Multi-site processing will allow partners to participate in the world first 450mm integration studies and will be enabled by the controlled exchange of 450mm wafers between different sites.
The consortium comprises 43 members (from 11 different European countries) with many SMEs and research institutes. The project is organized in five technical work packages and a work package on management and coordination.
In the work package on integration and wafer processing first critical modules will be developed and will demonstrate the feasibility of processing on 450mm wafers.
The main objective in the work package on lithography is to develop a wafer stage test-rig, which can be implemented into the pilot line system.
In the work package on front end equipment several tools will be developed such as a plasma ion implant module, a plasma dry etch module, a RTP system and a single wafer cleaning system.
Furthermore, in the dedicated work package on metrology 450mm metrology tool types will be developed for amongst others dielectric film thickness and composition measurements, defect inspection, defect review and analysis, optical critical dimensions (CD), overlay (mask and wafer) and 3D metrology.
Finally, from the work package on wafer handling and automation a set of equipment will be provided to support the demo line operations, and facilitate the R&D dedicated to process and metrology modules.
Campo scientifico
Invito a presentare proposte
ENIAC-2012-2
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Meccanismo di finanziamento
JTI-CP-ENIAC - Joint Technology Initiatives - Collaborative Project (ENIAC)Coordinatore
5504DR Veldhoven
Paesi Bassi
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Partecipanti (41)
74000 Annecy
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01237 DRESDEN
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76705 Rehovot
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8610 Uster
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3001 HEVERLEE
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73614 SCHORNDORF
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75015 PARIS 15
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7521 PH Enschede
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38430 MOIRANS
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4782 St Florian Am Inn
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612 00 Brno
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5651 GG Eindhoven
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51429 Bergisch Gladbach
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13790 Rousset
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65479 Raunheim
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3001 Leuven
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. LEIXLIP KILDARE
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61264 BRNO
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2306990 Migdal Haemek
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23100 Migdal Haemek
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9500 Villach
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1322 AP Almere
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70499 STUTTGART
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BS48 4DD Nailsea
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1117 Budapest
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8084 ZG 't Harde
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91401 Orsay
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76100 REHOVOT
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5692 EM Son
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31700 Blagnac
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7555 RJ Hengelo Ov
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95873 BEZONS
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1117 BUDAPEST
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63868 GROSSEWALLSTADT
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38190 Bernin
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85748 GARCHING
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2595 DA Den Haag
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2628 CN Delft
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5651 GG Eindhoven
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5705 CS Helmond
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D-73447 OBERKOCHEN
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