Objective The aim of the E450EDL project is to continue the engagement of the European semiconductor equipment and materials industry in the 450mm wafer size transition that started with the ENIAC JU EEMI450 initiative and proceeded with subsequent projects funded with public money, amongst others NGC450, SOI450, EEM450PR. The demo line resulting from this project will be such that it will enable first critical process module development by combining imec infrastructure with tools remaining at the site of the manufacturers (distributed pilot line). Multi-site processing will allow partners to participate in the world first 450mm integration studies and will be enabled by the controlled exchange of 450mm wafers between different sites. The consortium comprises 43 members (from 11 different European countries) with many SMEs and research institutes. The project is organized in five technical work packages and a work package on management and coordination. In the work package on integration and wafer processing first critical modules will be developed and will demonstrate the feasibility of processing on 450mm wafers.The main objective in the work package on lithography is to develop a wafer stage test-rig, which can be implemented into the pilot line system.In the work package on front end equipment several tools will be developed such as a plasma ion implant module, a plasma dry etch module, a RTP system and a single wafer cleaning system.Furthermore, in the dedicated work package on metrology 450mm metrology tool types will be developed for amongst others dielectric film thickness and composition measurements, defect inspection, defect review and analysis, optical critical dimensions (CD), overlay (mask and wafer) and 3D metrology.Finally, from the work package on wafer handling and automation a set of equipment will be provided to support the demo line operations, and facilitate the R&D dedicated to process and metrology modules. Fields of science social sciencessociologyindustrial relationsautomationnatural sciencesphysical scienceselectromagnetism and electronicssemiconductivity Programme(s) FP7-JTI - Specific Programme "Cooperation": Joint Technology Initiatives Topic(s) SP1-JTI-ENIAC-2012-2-8 - Equipment, materials and manufacturing Call for proposal ENIAC-2012-2 See other projects for this call Funding Scheme JTI-CP-ENIAC - Joint Technology Initiatives - Collaborative Project (ENIAC) Coordinator ASML NETHERLANDS B.V. EU contribution € 7 500 000,00 Address DE RUN 6501 5504DR Veldhoven Netherlands See on map Region Zuid-Nederland Noord-Brabant Zuidoost-Noord-Brabant Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Links Contact the organisation Opens in new window Website Opens in new window Total cost No data Participants (41) Sort alphabetically Sort by EU Contribution Expand all Collapse all PFEIFFER VACUUM France EU contribution € 453 571,00 Address 98 AVENUE DE BROGNY 74000 Annecy See on map Region Auvergne-Rhône-Alpes Rhône-Alpes Haute-Savoie Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Links Contact the organisation Opens in new window Website Opens in new window Total cost No data AIS AUTOMATION DRESDEN GmbH Germany EU contribution € 132 015,00 Address OTTO-MOHR STRASSE 6 01237 DRESDEN See on map Region Sachsen Dresden Dresden, Kreisfreie Stadt Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Links Contact the organisation Opens in new window Website Opens in new window Total cost No data APPLIED MATERIALS ISRAEL LTD Israel EU contribution € 4 494 180,00 Address OPPENHEIMER STREET 9 76705 Rehovot See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Links Contact the organisation Opens in new window Total cost No data ARTEMIS CONTROL AG Switzerland EU contribution € 81 468,00 Address Seestrasse 147 8610 Uster See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Links Contact the organisation Opens in new window Website Opens in new window Total cost No data ASM BELGIUM NV Belgium EU contribution € 249 172,00 Address KAPELDREEF 75 3001 HEVERLEE See on map Region Vlaams Gewest Prov. 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KG Germany EU contribution € 35 606,00 Address Gottlob-Bauknecht-Str. 4 73614 SCHORNDORF See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Links Contact the organisation Opens in new window Website Opens in new window Total cost No data COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES France EU contribution € 162 793,00 Address RUE LEBLANC 25 75015 PARIS 15 See on map Region Ile-de-France Ile-de-France Paris Activity type Research Organisations Administrative Contact Links Contact the organisation Opens in new window Website Opens in new window Total cost No data DEMCON LIFE SCIENCES & HEALTH ENSCHEDE BV Netherlands EU contribution € 161 737,00 Address INSTITUTENWEG 25 7521 PH Enschede See on map Region Oost-Nederland Overijssel Twente Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Links Contact the organisation Opens in new window Website Opens in new window Total cost No data Entegris Cleaning Process (ECP) SAS France EU contribution € 67 841,00 Address RUE DU ROCHER DE LORZIER 196 38430 MOIRANS See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Links Contact the organisation Opens in new window Website Opens in new window Total cost No data EV GROUP E. 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Czechia EU contribution € 15 000,00 Address KRALOVOPOLSKA 147 61264 BRNO See on map Activity type Research Organisations Administrative Contact Links Contact the organisation Opens in new window Website Opens in new window Total cost No data BRUKER TECHNOLOGIES LTD Israel EU contribution € 709 446,00 Address 6 HAMECHKAR STREET RAMAT GAVRIEL INDUSTRIAL ZONE 2306990 Migdal Haemek See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Links Contact the organisation Opens in new window Total cost No data KLA-TENCOR CORPORATION (ISRAEL) Israel EU contribution € 709 519,00 Address HATIKSHORET ST. 23100 Migdal Haemek See on map Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Links Contact the organisation Opens in new window Total cost No data LAM RESEARCH AG Austria EU contribution € 810 864,00 Address SEZ-STRASSE 1 9500 Villach See on map Region Südösterreich Kärnten Klagenfurt-Villach Activity type Private for-profit entities (excluding Higher or Secondary Education Establishments) Administrative Contact Links Contact the organisation Opens in new window Total cost No data Levitech B.V. 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