Obiettivo
General Goals
Lab4MEMS will feature the Pilot Line for innovative technologies on advanced piezoelectric and magnetic materials, expected to fuel the next generation’s smart sensors and actuators based on MEMS:
1. Micro-actuators, micro-pumps, sensors and electrical power generators, integrated on silicon-based piezoelectric materials (PZT)
• for use in Data Storage, Ink Jet, Health Care, Automotive and Energy Scavenging
2. Magnetic field sensors integrated on silicon-based Anisotropic Magneto Resistance (AMR) materials.
• for use in consumer applications such as GPS positioning and mobile phones
3. Advanced packaging technologies and vertical interconnections (flip chip, Through Silicon Vias or Through Mold Vias) for full 3D integration.
• For use in CONSUMER and HEALTHCARE application such as body area sensors and remote monitoring.
Lab4MEMS will be promoted as an add-on to the current Manufacturing facilities located in each respective participating countries, aiming to implement and optimize the industrial processes and to validate the demonstrators suitable to penetrate the market.
Potential impact:
This pilot line will fit a new set of R&D equipments and tools for PZT and AMR, as part of a larger manufacturing facility already in place in Agrate Brianza (Italy) for high volume 3-axis MEMS accelerometers and gyroscope (i.e. >100M devices/month). This strategy will allow increasing and maintaining the know-how on those very strategic enabling technologies, combining scientific skills with the ability to design and manufacture a wide range of smart micro-nano systems on silicon.
The Lab4MEMS Pilot Line will be based on 200 mm wafer scale (with a forward looking impact analysis for a future move to 300mm wafer) and it will process more than 600 wafers/week, once in operation.
Campo scientifico
- engineering and technologyelectrical engineering, electronic engineering, information engineeringelectronic engineeringsensorssmart sensors
- engineering and technologyelectrical engineering, electronic engineering, information engineeringinformation engineeringtelecommunicationsmobile phones
- natural scienceschemical sciencesinorganic chemistrymetalloids
- engineering and technologyelectrical engineering, electronic engineering, information engineeringelectrical engineeringpiezoelectrics
Argomento(i)
Invito a presentare proposte
ENIAC-2012-2
Vedi altri progetti per questo bando
Meccanismo di finanziamento
JTI-CP-ENIAC - Joint Technology Initiatives - Collaborative Project (ENIAC)Coordinatore
20864 Agrate Brianza
Italia
Mostra sulla mappa
Partecipanti (20)
10129 Torino
Mostra sulla mappa
10129 Torino
Mostra sulla mappa
16163 Genova
Mostra sulla mappa
20133 Milano
Mostra sulla mappa
40125 Bologna
Mostra sulla mappa
75015 PARIS 15
Mostra sulla mappa
33608 PESSAC
Mostra sulla mappa
Mostra sulla mappa
2080 MSIDA
Mostra sulla mappa
7521 PE Enschede
Mostra sulla mappa
5211 VW 'S-HERTOGENBOSCH
Mostra sulla mappa
01510 Vantaa
Mostra sulla mappa
01620 Vantaa
Mostra sulla mappa
02150 Espoo
Mostra sulla mappa
3001 Heverlee
Mostra sulla mappa
060042 Bucharest
Mostra sulla mappa
02668 WARSZAWA
Mostra sulla mappa
7034 Trondheim
Mostra sulla mappa
0283 Oslo
Mostra sulla mappa
6240 RADFELD/TIROL
Mostra sulla mappa