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High Precision, Automated CD Metrology Station

Objective

The goal of the METRICS project was to tackle the major risk elements in the development of a critical dimension (CD) measuring tool, based on electron optics, for the sub-half micron regime.
The goal of the METRICS project was to tackle the major risk elements in the development of a critical dimension (CD) measuring tool, based on electron optics, for the sub-half micron regime.
In the course of the project, all those elements identified as having significant risk have been addressed and suitable solutions developed.
Full automation of all relevant scanning electron microscope (SEM) functions to match fabline requirements have been demonstrated. This included a laser based closed loop control system to control the height of the wafer relative to the objective lens. This eliminates the need manual focussing, and allows constant excitation of the objective lens for maximum reproducibility. New algorithms have been demonstrated that extend the Monte Carlo modelling of electron/matter interaction into the low voltage region with sufficient accuracy to predict physical profiles based on backscattered and secondary electron yield. Metrology software with subpixel interpolation for high precision measurements with maximum ease of use has been developed. Revolutionary detector designs to maximize the yield of those electrons carrying the most information have been demonstrated. A low voltage retarding field emission gun electron column that shows performance well in advance of any known commercial system has been developed.
These achievements will be consolidated into a metrology system that will satisfy the needs of the industry for sub-half micron metrology. However, a number of the project deliverables will be commercialized from their current form.

Coordinator

NEDERLANDSE PHILIPS BEDRIJVEN BV
Address
Kastanjelaan, 1218
5600 MD Eindhoven
Netherlands

Participants (7)

CCLRC Rutherford Appleton Laboratory (RAL)
United Kingdom
Address
Chilton
OX11 0QX Didcot
INTEGRATED CIRCUIT TESTING
Germany
Address
Klausnerring 1A
85551 Kirchheim
Interuniversitair Mikroelektronica Centrum
Belgium
Address
Kapeldreef 75
3030 Heverlee
NEDERLANDSE PHILIPS BEDRIJVEN BV
Netherlands
Address
Prof. Holstlaan, 4
5656 AA Eindhoven
NEDERLANDSE PHILIPS BEDRIJVEN BV
Netherlands
Address
Gersteweg, 2
6534 AE Nijmegen
Siemens AG
Germany
Address
Balanstraße 73
81541 München
Thomson Microelectronics Srl (SGS)
Italy
Address
Via Carlo Olivetti
20041 Agrate Brianza Milano