Objective
The goal of the METRICS project was to tackle the major risk elements in the development of a critical dimension (CD) measuring tool, based on electron optics, for the sub-half micron regime.
The goal of the METRICS project was to tackle the major risk elements in the development of a critical dimension (CD) measuring tool, based on electron optics, for the sub-half micron regime.
In the course of the project, all those elements identified as having significant risk have been addressed and suitable solutions developed.
Full automation of all relevant scanning electron microscope (SEM) functions to match fabline requirements have been demonstrated. This included a laser based closed loop control system to control the height of the wafer relative to the objective lens. This eliminates the need manual focussing, and allows constant excitation of the objective lens for maximum reproducibility. New algorithms have been demonstrated that extend the Monte Carlo modelling of electron/matter interaction into the low voltage region with sufficient accuracy to predict physical profiles based on backscattered and secondary electron yield. Metrology software with subpixel interpolation for high precision measurements with maximum ease of use has been developed. Revolutionary detector designs to maximize the yield of those electrons carrying the most information have been demonstrated. A low voltage retarding field emission gun electron column that shows performance well in advance of any known commercial system has been developed.
These achievements will be consolidated into a metrology system that will satisfy the needs of the industry for sub-half micron metrology. However, a number of the project deliverables will be commercialized from their current form.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences computer and information sciences software
- engineering and technology electrical engineering, electronic engineering, information engineering electronic engineering control systems
- social sciences sociology industrial relations automation
- natural sciences physical sciences optics microscopy electron microscopy
- natural sciences physical sciences optics laser physics
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
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Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
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Coordinator
5600 MD EINDHOVEN
Netherlands
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.