Final Report Summary - ENLIGHTENED (Nanophotonic Nanomechanical Mass Spectrometry for Biology and Health)
Another outcome of the project consists in the study of the limiting source of noise in the frequency stability of nanoresonators. The project showed that this source of noise was commonly ignored by the research community, while it is most likely ubiquitous in many devices and degrades resonant sensors resolution by two to three orders of magnitude compared to theoretical limits.
Lastly, Enlightened developed the first Very Large Scale Integration technology for optomechanics, on 200mm silicon wafers, merging M/NEMS and silicon photonics processes. This technology proved state of the art performance for sensing, and we performed the first demonstration of mass spectrometry with optomechanical resonators. This demonstration showed an order of magnitude improvement in analysis time compared to electrical sensors.