Objective
The overall goal of the E450LMDAP project is to develop 450 mm lithography and metrology modules and tools and to initiate distributed pilot line activities over the 450 mm lithography and metrology tool platform eco system. These pilot line activities will go down to the pilot lines of the lithography tool and the related (sub-)systems and components supply chain and metrology tool suppliers. In addition, also early 1x node patterning module qualification at the imec’s pilot line will be part of the project. Lithography, metrology and deposition equipment performance suited for 450 mm will be demonstrated, interconnected with holistic methodologies to the 450 mm pilot line at imec which is equipped with European systems. The project will complement the engagement of the European semiconductor equipment industry in the 450mm wafer size transition that started with the ENIAC JU EEMI450 initiative and proceeded with subsequent projects funded with public money, amongst others NGC450, SOI450, EEM450PR and E450EDL which will result into first critical process module availability in the imec pilot line.
The consortium comprises 44 members from 7 different European countries with SMEs and research institutes and also IDM as end users. The project is organized in three technical work packages and a work package on management and coordination.
The main objective in the work package on lithography is to develop and to have prototyping activities comprising amongst others wafer stage, wafer handler, optics, electronic as well as preliminary tool system qualification.
In the dedicated work package on metrology 450mm metrology tool types will be developed for wafer and mask platforms as well as a holistic metrology data hub for advance lithography data management and fab.
Finally, in the work package on advanced patterning a selection of critical N10 layers, which are currently under development at 300mm wafer sizes, will be transferred to an early 450mm lithography platform.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences physical sciences optics
- natural sciences physical sciences electromagnetism and electronics semiconductivity
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
ENIAC-2013-2
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Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
JTI-CP-ENIAC - Joint Technology Initiatives - Collaborative Project (ENIAC)
Coordinator
5504DR VELDHOVEN
Netherlands
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Participants (40)
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74000 ANNECY
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76705 REHOVOT
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1109 Dresden
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3001 HEVERLEE
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2919 Essen
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73614 SCHORNDORF
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7602EA Almelo
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12347 Berlin
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70839 Gerlingen-Schillerhoehe
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5281 RV BOXTEL
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5674 CC NUENEN
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75015 Paris
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91300 MASSY
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38430 MOIRANS
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01109 Dresden
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65479 Raunheim
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3001 Leuven
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31500 Toulouse
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5667 EN Eindhoven
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2306990 Migdal Haemek
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23100 Migdal Haemek
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5657 BX Eindhoven
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75794 PARIS
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20692 Yoqneam
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5692 EP Son En Breugel
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76100 REHOVOT
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OX13 5QX Abingdon
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5692 EM Son
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31700 Blagnac
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7555 RJ Hengelo Ov
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5656 AE EINDHOVEN
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63868 GROSSEWALLSTADT
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38920 CROLLES
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2595 DA DEN HAAG
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01109 Dresden
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2628 CN DELFT
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5651 GG Eindhoven
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07745 Jena
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21613 Karmiel
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