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European 450mm Lithography and Metrology Development for Advanced Patterning

Objective

The overall goal of the E450LMDAP project is to develop 450 mm lithography and metrology modules and tools and to initiate distributed pilot line activities over the 450 mm lithography and metrology tool platform eco system. These pilot line activities will go down to the pilot lines of the lithography tool and the related (sub-)systems and components supply chain and metrology tool suppliers. In addition, also early 1x node patterning module qualification at the imec’s pilot line will be part of the project. Lithography, metrology and deposition equipment performance suited for 450 mm will be demonstrated, interconnected with holistic methodologies to the 450 mm pilot line at imec which is equipped with European systems. The project will complement the engagement of the European semiconductor equipment industry in the 450mm wafer size transition that started with the ENIAC JU EEMI450 initiative and proceeded with subsequent projects funded with public money, amongst others NGC450, SOI450, EEM450PR and E450EDL which will result into first critical process module availability in the imec pilot line.
The consortium comprises 44 members from 7 different European countries with SMEs and research institutes and also IDM as end users. The project is organized in three technical work packages and a work package on management and coordination.
The main objective in the work package on lithography is to develop and to have prototyping activities comprising amongst others wafer stage, wafer handler, optics, electronic as well as preliminary tool system qualification.
In the dedicated work package on metrology 450mm metrology tool types will be developed for wafer and mask platforms as well as a holistic metrology data hub for advance lithography data management and fab.
Finally, in the work package on advanced patterning a selection of critical N10 layers, which are currently under development at 300mm wafer sizes, will be transferred to an early 450mm lithography platform.

Field of science

  • /natural sciences/physical sciences/optics
  • /natural sciences/physical sciences/electromagnetism and electronics/electrical conductivity/semiconductor

Call for proposal

ENIAC-2013-2
See other projects for this call

Funding Scheme

JTI-CP-ENIAC - Joint Technology Initiatives - Collaborative Project (ENIAC)

Coordinator

ASML NETHERLANDS B.V.
Address
De Run 6501
5504DR Veldhoven
Netherlands
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
EU contribution
€ 15 516 436,45
Administrative Contact

Participants (40)

AAE B.V.
Netherlands
EU contribution
€ 75 484,18
Address
Grasbeemd 2
5700 AL Helmond
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
PFEIFFER VACUUM
France
EU contribution
€ 377 048,47
Address
98 Avenue De Brogny
74000 Annecy
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
APPLIED MATERIALS ISRAEL LTD
Israel
EU contribution
€ 7 341 572,18
Address
Oppenheimer Street 9
76705 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ADVANCED MASK TECHNOLOGY CENTER GMBH & CO KG
Germany
EU contribution
€ 486 384,40
Address
Rahnitzer Allee 9
1109 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ASM BELGIUM NV
Belgium
EU contribution
€ 423 036
Address
Kapeldreef 75
3001 Heverlee
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ASML BELGIUM BVBA
Belgium
EU contribution
€ 362 256,90
Address
Kalmthoutsesteenweg 100
2919 Essen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ASYS GmbH & Co. KG
Germany
EU contribution
€ 250 119,49
Address
Gottlob-bauknecht-str. 4
73614 Schorndorf
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Benchmark Electronics B.V.
Netherlands
EU contribution
€ 252 060
Address
Lelyweg 10
7602EA Almelo
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
BERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO
Germany
EU contribution
€ 3 277 793,27
Address
Waldkraiburger Strasse 5
12347 Berlin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
ROBERT BOSCH GMBH
Germany
EU contribution
€ 515 862,24
Address
Robert-bosch-platz 1
70839 Gerlingen-schillerhoehe
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Bosch Rexroth B.V.
Netherlands
EU contribution
€ 117 150
Address
Kruisbroeksestraat 1
5281 RV Boxtel
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
SIOUX CCM BV
Netherlands
EU contribution
€ 297 167,55
Address
De Pinckart 24
5674 CC Nuenen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
COMMISSARIAT A L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
France
EU contribution
€ 466 063,61
Address
Rue Leblanc 25
75015 Paris 15
Activity type
Research Organisations
Administrative Contact
COVENTOR SARL
France
EU contribution
€ 172 390,77
Address
Avenue Du Quebec 3
91140 Villebon Sur Yvette
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Entegris Cleaning Process (ECP) SAS
France
EU contribution
€ 53 280,63
Address
Rue Du Rocher De Lorzier 196
38430 Moirans
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
GLOBALFOUNDRIES Dresden Module One LLC & Co. KG
Germany
Address
Wilschdorfer Landstrasse 101
01109 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Integrated Dynamics Engineering GmbH
Germany
EU contribution
€ 1 468 220,10
Address
Karl-liebknecht-strasse 30
65479 Raunheim
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium
EU contribution
€ 631 151
Address
Kapeldreef 75
3001 Leuven
Activity type
Research Organisations
Administrative Contact
IPPON INNOVATION
France
EU contribution
€ 53 171,64
Address
4 Rue Du Poisson
31500 Toulouse
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Irmato Industrial Solutions Eindhoven BV
Netherlands
EU contribution
€ 252 910,90
Address
Marinus Van Meelweg 24
5667 EN Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
BRUKER TECHNOLOGIES LTD
Israel
EU contribution
€ 773 334,30
Address
6 Hamechkar Street Ramat Gavriel Industrial Zone
2306990 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
KLA-TENCOR CORPORATION (ISRAEL)
Israel
EU contribution
€ 2 287 897,56
Address
Hatikshoret St.
23100 Migdal Haemek
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
KMWE PRECISION BV
Netherlands
EU contribution
€ 485 070,14
Address
Bic 1
5657 BX Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS
France
EU contribution
€ 59 173,49
Address
Rue Michel Ange 3
75794 Paris
Activity type
Research Organisations
Administrative Contact
Nanomotion Ltd.
Israel
EU contribution
€ 405 951,16
Address
Hayetzira 3
20692 Yoqneam
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
NEWAYS TECHNOLOGIES BV
Netherlands
EU contribution
€ 252 496,58
Address
Science Park Eindhoven 5010
5692 EA Son
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
NOVA MEASURING INSTRUMENTS LTD
Israel
EU contribution
€ 1 601 196,85
Address
Weizmann Science Park Building 22
76100 Rehovot
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
United Kingdom
EU contribution
€ 162 015
Address
Tubney Woods
OX13 5QX Abingdon
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
PRODRIVE TECHNOLOGIES BV
Netherlands
EU contribution
€ 285 951
Address
Science Park Eindhoven 5501
5692 EM Son
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
RECIF TECHNOLOGIES
France
EU contribution
€ 45 207,21
Address
Rue Des Briquetiers 9
31700 Blagnac
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
REDEN B.V.
Netherlands
EU contribution
€ 58 363,23
Address
F Hazemeijerstraat 800
7555 RJ Hengelo Ov
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
SEGULA Technologies Nederland B.V.
Netherlands
EU contribution
€ 66 286,50
Address
High Tech Campus 9
5656 AE Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
SemiLev GmbH
Germany
EU contribution
€ 65 440,81
Address
Industriering 7
63868 Grossewallstadt
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
STMICROELECTRONICS CROLLES 2 SAS
France
EU contribution
€ 616 580,99
Address
Rue Jean Monnet 850
38920 Crolles
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Netherlands
EU contribution
€ 798 485,46
Address
Anna Van Buerenplein 1
2595 DA Den Haag
Activity type
Research Organisations
Administrative Contact
Toppan Photomasks Germany GmbH
Germany
EU contribution
€ 590 481,89
Address
Raehnitzer Allee 9
01109 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
TECHNISCHE UNIVERSITEIT DELFT
Netherlands
EU contribution
€ 206 394,30
Address
Stevinweg 1
2628 CN Delft
Activity type
Higher or Secondary Education Establishments
Administrative Contact
VDL ENABLING TECHNOLOGIES GROUP EINDHOVEN BV
Netherlands
EU contribution
€ 10 373 342,79
Address
Achtseweg Noord 5 Ak-1 K113
5651 GG Eindhoven
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
CARL ZEISS SMS GMBH
Germany
EU contribution
€ 300 202,79
Address
Carl Zeiss Promenade 10
07745 Jena
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Carl Zeiss SMT GmbH
Germany
EU contribution
€ 16 653 951,47
Address
Maale Camon 44
21613 Karmiel
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact