Multi-Axial Monolithic Integrated Accelerometer

Objective

Sensors such as accelerometers are important components in the automotive industry. To compete on the world market, a new class of sensors is required with better performance, reliability, system (bus) compatibility, interchangeability, and at lower cost levels.

The main objectives of MAXIMA are to:

- establish the compatibility of micromachining techniques with existing industrial IC fabrication lines
- develop a complete process flow for monolithic integrated smart sensors (MISS)
- develop material characterisation methods, design rules and software tools for MISS
- establish basic sensor technologies for a broad field of MISS applications
- make MISS technologies for a broad field of MISS application
- make MISS technologies available for SMEs
- strengthen the position of the automotive industry.
Processes for the deposition and wet etching of various oxides as the sacrificial layer and for deposition and dry etching of polysilicon from 1 micron up to 10 micron thickness have been developed. Relevant parameters for accelerometer designs have been determined with specially designed test structures and equipment. Two different process flows for the integration of the sensors into a bipolar complementary metal oxide semiconductor (BICMOS) process have been developed, 24 different capacitive sensors for x, y and z axis measurement without on-chip electronics were fabricated with subsets of the integrated process flows. Different approaches for sensor signal detection and force feedback have been investigated in detail. Various single chip three-axis accelerometers with on-chip electronics were designed and fabricated with the developed process flows. Application specific tests were performed at SEAT.
Silicon-based sensors using micromachining technologies to create the sensor function are the most promising candidates to fulfil these requirements. Monolithic integration with microelectronic circuits creates a unique possibility to achieve an improved quality of sensor systems. A demonstrator 3-D accelerometer will be fabricated and tested in the automotive environment. Applications are expected in four major areas: air-bag and safety restraint systems; adaptive and active suspension systems; braking and tracking control; and navigation and guidance.

Fields of science

• natural sciences › computer and information sciences › software
• natural sciences › chemical sciences › inorganic chemistry › inorganic compounds
• engineering and technology › electrical engineering, electronic engineering, information engineering › electronic engineering › sensors › smart sensors
• engineering and technology › mechanical engineering › vehicle engineering › automotive engineering
• natural sciences › physical sciences › electromagnetism and electronics › semiconductivity

Programme(s)

• FP3-ESPRIT 3 - Specific research and technological development programme (EEC) in the field of information technologies, 1990-1994

Topic(s)

Data not available

Call for proposal

Data not available

Funding Scheme

Data not available

Coordinator

Fraunhofer-Gesellschaft zur Förderungder Angewandten Forschung e.V.

Address

Dillenburgerstrasse
14199 Berlin
Germany

Participants (6)

AMBIT

Greece

Address

Polemiston, 5
16452 Athenes

Centro Nacional de Microelectronica

Spain

Address

Campus Uab
08193 Bellaterra

ROBERT BOSCH GMBH

Germany

Address

Tuebinger Strasse 123
72762 Reutlingen

SOCIEDAD ESPANOLA DE AUTOMOVILES DE TURISMO

Spain

Address

Passo De La Castellana, 278
28046 Madrid

UNIVERSITAT POLITECNICA DE CATALUNYA

Spain

Address

Diagonal 647
08028 Barcelona

UNIVERSITY OF UPPSALA

Sweden

Address

75121 Uppsala