Multi-Axial Monolithic Integrated Accelerometer

Informazioni relative al progetto

MAXIMA

ID dell’accordo di sovvenzione: 6416

Progetto chiuso

Data di avvio 1 Aprile 1992

Data di completamento 31 Marzo 1995

Finanziato da

• Specific research and technological development programme (EEC) in the field of information technologies, 1990-1994

Costo totale

Nessun dato

Contributo UE

Nessun dato

Coordinato da

Fraunhofer-Gesellschaft zur Förderungder Angewandten Forschung e.V.
Germany

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Risultati sfruttabili

Monolithic integrated smart accelerometers

Processes for the deposition and wet etching of various oxides as the sacrificial layer and for deposition and dry etching of polysilicon from 1 micron up to 10 micron thickness have been developed. Relevant parameters for accelerometer designs have been determined with specially designed test structures and equipment. Two different process flows for the integration of the sensors into a bipolar complementary metal oxide semiconductor (BICMOS) process have been developed, 24 different capacitive sensors for x, y and z axis measurement without on-chip electronics were fabricated with subsets of the integrated process flows. Different approaches for sensor signal detection and force feedback have been investigated in detail. Various single chip three-axis accelerometers with on-chip electronics were designed and fabricated with the developed process flows. Application specific tests were performed at SEAT.