Atomic layer deposition of two-dimensional transition metal dichalcogenide nanolayers

Project Information

ALDof 2DTMDs

Grant agreement ID: 648787

DOI 10.3030/648787

Project closed

EC signature date 21 May 2015

Start date 1 August 2015

End date 31 December 2020

Funded under

• EXCELLENT SCIENCE - European Research Council (ERC)

Total cost € 1 968 708,75

EU contribution € 1 968 708,75

Coordinated by

TECHNISCHE UNIVERSITEIT EINDHOVEN
Netherlands

Publications

Peer reviewed articles (16)

Atomic Layer Deposition of Al-Doped MoS 2 : Synthesizing a p-type 2D Semiconductor with Tunable Carrier Density

Author(s): Vincent Vandalon, Marcel A. Verheijen, Wilhelmus M. M. Kessels, Ageeth A. Bol
Published in: ACS Applied Nano Materials, Issue 3/10, 2020, Page(s) 10200-10208, ISSN 2574-0970
Publisher: ACS
DOI: 10.1021/acsanm.0c02167

Cu Electrodeposition on Nanostructured MoS 2 and WS 2 and Implications for HER Active Site Determination

Author(s): Longfei Wu, Nelson Y. Dzade, Ning Chen, Bas van Dijk, Shashank Balasubramanyam, Akhil Sharma, Lu Gao, Dennis G. H. Hetterscheid, Emiel J. M. Hensen, Ageeth A. Bol, Nora H. De Leeuw, Jan P. Hofmann
Published in: Journal of The Electrochemical Society, Issue 167/11, 2020, Page(s) 116517, ISSN 1945-7111
Publisher: ECS
DOI: 10.1149/1945-7111/aba5d8

Conformal Growth of Nanometer-Thick Transition Metal Dichalcogenide TiS x -NbS x Heterostructures over 3D Substrates by Atomic Layer Deposition: Implications for Device Fabrication

Author(s): Saravana Balaji Basuvalingam, Matthew A. Bloodgood, Marcel A. Verheijen, Wilhelmus M. M. Kessels, Ageeth A. Bol
Published in: ACS Applied Nano Materials, Issue 4/1, 2021, Page(s) 514-521, ISSN 2574-0970
Publisher: ACS
DOI: 10.1021/acsanm.0c02820

Synthesis of edge-enriched WS 2 on high surface area WS 2 framework by atomic layer deposition for electrocatalytic hydrogen evolution reaction

Author(s): Shashank Balasubramanyam, Matthew A. Bloodgood, Yue Zhang, Marcel A. Verheijen, Wilhelmus M. M. Kessels, Jan P. Hofmann, Ageeth A. Bol
Published in: Journal of Vacuum Science & Technology A, Issue 38/6, 2020, Page(s) 062201, ISSN 0734-2101
Publisher: American Institute of Physics
DOI: 10.1116/6.0000563

Plasma-enhanced atomic layer deposition of tungsten oxide thin films using ( t BuN) 2 (Me 2 N) 2 W and O 2 plasma

Author(s): Shashank Balasubramanyam, Akhil Sharma, Vincent Vandalon, Harm C. M. Knoops, Wilhelmus M. M. (Erwin) Kessels, Ageeth A. Bol
Published in: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Issue 36/1, 2018, Page(s) 01B103, ISSN 0734-2101
Publisher: American Institute of Physics
DOI: 10.1116/1.4986202

Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS 2 : large area, thickness control and tuneable morphology

Author(s): Akhil Sharma, Marcel A. Verheijen, Longfei Wu, Saurabh Karwal, Vincent Vandalon, Harm C. M. Knoops, Ravi S. Sundaram, Jan P. Hofmann, W. M. M. (Erwin) Kessels, Ageeth A. Bol
Published in: Nanoscale, Issue 10/18, 2018, Page(s) 8615-8627, ISSN 2040-3364
Publisher: Royal Society of Chemistry
DOI: 10.1039/c8nr02339e

Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films

Author(s): Saravana Balaji Basuvalingam, Bart Macco, Harm C. M. Knoops, Jimmy Melskens, Wilhelmus M. M. (Erwin) Kessels, Ageeth A. Bol
Published in: Journal of Vacuum Science & Technology A, Issue 36/4, 2018, Page(s) 041503, ISSN 0734-2101
Publisher: American Institute of Physics
DOI: 10.1116/1.5034097

Initial stage of atomic layer deposition of 2D-MoS 2 on a SiO 2 surface: a DFT study

Author(s): M. Shirazi, W. M. M. Kessels, A. A. Bol
Published in: Physical Chemistry Chemical Physics, Issue 20/24, 2018, Page(s) 16861-16875, ISSN 1463-9076
Publisher: Royal Society of Chemistry
DOI: 10.1039/c8cp00210j

Anisotropic infrared light emission from quasi-1D layered TiS 3

Author(s): Ali Khatibi, Rasmus H Godiksen, Saravana Balaji Basuvalingam, Daniele Pellegrino, Ageeth A Bol, Babak Shokri, Alberto G Curto
Published in: 2D Materials, Issue 7/1, 2020, Page(s) 015022, ISSN 2053-1583
Publisher: IOP
DOI: 10.1088/2053-1583/ab57ef

Large area, patterned growth of 2D MoS 2 and lateral MoS 2 –WS 2 heterostructures for nano- and opto-electronic applications

Author(s): Akhil Sharma, Reyhaneh Mahlouji, Longfei Wu, Marcel A Verheijen, Vincent Vandalon, Shashank Balasubramanyam, Jan P Hofmann, W M M (Erwin) Kessels, Ageeth A Bol
Published in: Nanotechnology, Issue 31/25, 2020, Page(s) 255603, ISSN 0957-4484
Publisher: Institute of Physics Publishing
DOI: 10.1088/1361-6528/ab7593

Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS 2 Layers

Author(s): Shashank Balasubramanyam, Matthew A. Bloodgood, Mark van Ommeren, Tahsin Faraz, Vincent Vandalon, Wilhelmus M. M. Kessels, Marcel A. Verheijen, Ageeth A. Bol
Published in: ACS Applied Materials & Interfaces, Issue 12/3, 2019, Page(s) 3873-3885, ISSN 1944-8244
Publisher: American Chemical Society
DOI: 10.1021/acsami.9b19716

Edge-Site Nanoengineering of WS 2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution

Author(s): Shashank Balasubramanyam, Mahdi Shirazi, Matthew A. Bloodgood, Longfei Wu, Marcel A. Verheijen, Vincent Vandalon, Wilhelmus M. M. Kessels, Jan P. Hofmann, Ageeth A. Bol
Published in: Chemistry of Materials, Issue 31/14, 2019, Page(s) 5104-5115, ISSN 0897-4756
Publisher: American Chemical Society
DOI: 10.1021/acs.chemmater.9b01008

Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition

Author(s): Saravana Balaji Basuvalingam, Yue Zhang, Matthew A. Bloodgood, Rasmus H. Godiksen, Alberto G. Curto, Jan P. Hofmann, Marcel A. Verheijen, Wilhelmus M. M. Kessels, Ageeth A. Bol
Published in: Chemistry of Materials, Issue 31/22, 2019, Page(s) 9354-9362, ISSN 0897-4756
Publisher: American Chemical Society
DOI: 10.1021/acs.chemmater.9b02895

Polarized Raman spectroscopy to elucidate the texture of synthesized MoS 2

Author(s): Vincent Vandalon, Akhil Sharma, Alberto Perrotta, Benedikt Schrode, Marcel A. Verheijen, Ageeth A. Bol
Published in: Nanoscale, Issue 11/47, 2019, Page(s) 22860-22870, ISSN 2040-3364
Publisher: Royal Society of Chemistry
DOI: 10.1039/c9nr08750h

The Origin of High Activity of Amorphous MoS 2 in the Hydrogen Evolution Reaction

Author(s): Longfei Wu, Alessandro Longo, Nelson Y. Dzade, Akhil Sharma, Marco M. R. M. Hendrix, Ageeth A. Bol, Nora H. Leeuw, Emiel J. M. Hensen, Jan P. Hofmann
Published in: ChemSusChem, Issue 12/19, 2019, Page(s) 4383-4389, ISSN 1864-5631
Publisher: Wiley - V C H Verlag GmbbH & Co.
DOI: 10.1002/cssc.201901811

Strategies to facilitate the formation of free standing MoS 2 nanolayers on SiO 2 surface by atomic layer deposition: A DFT study

Author(s): M. Shirazi, W. M. M. Kessels, A. A. Bol
Published in: APL Materials, Issue 6/11, 2018, Page(s) 111107, ISSN 2166-532X
Publisher: AIP
DOI: 10.1063/1.5056213