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Development of a New Wavelength Scanning Interferometer for Embedded Metrology

Publications

In-situ defect detection systems for R2R flexible PV barrier films

Author(s): Gao, Feng, Muhamedsalih, Hussam, Tang, Dawei, Elrawemi, Mohamed, Blunt, Liam, Jiang, Xiang, Edge, Steven, Bird, David and Hollis, Philip
Published in: International Conference on Optical Instrument and Technology, 2015
Publisher: SPIE

A computerised data handling procedure for defect detection and analysis for large area substrates manufactured by roll-to-roll process

Author(s): Muhamedsalih, H., Elrawemi, M., Blunt, L., Xiangqi, L. and Martin, H. (
Published in: Laser Metrology and Machine Performance XI, LAMDAMAP 2015, 2015
Publisher: EUSPEN

Extending the vertical range of wavelength scanning interferometry

Author(s): Moschetti, G., Muhamedsalih, H., Jiang, X., Leach, R. and O'Connor, D.
Published in: ASPE 2015 Summer Topical Meeting, 2015, ISBN 978-1-887706-68-1
Publisher: American Society for Precision Engineering

An integrated opto-mechanical measurement system for in-process defect measurement on a roll-to-roll process

Author(s): Muhamedsalih, H., Blunt, L., Martin, H., Hamersma, I., Elrawemi, M. and Feng, G.
Published in: Laser Metrology and Machine Performance XI, LAMDAMAP, 2015, Page(s) 50-55, ISBN 978-0-9566790-5-5
Publisher: EUSPEN

Vertical axis non-linearities in wavelength scanning interferometry

Author(s): Moschetti, G., Muhamedsalih, H., Connor, D., Jiang, X. and Leach, R.
Published in: Laser Metrology and Machine Performance XI, LAMDAMAP 2015, 2015, Page(s) 31-39, ISBN 978-0-9566790-5-5
Publisher: EUSPEN

Phase and fringe order determination in wavelength scanning interferometry

Author(s): Giuseppe Moschetti, Alistair Forbes, Richard K Leach, Xiang Jiang, Daniel O’Connor
Published in: Optics Express, 24/8, 2016, Page(s) 8997, ISSN 1094-4087
Publisher: Optical Society of America
DOI: 10.1364/OE.24.008997

Burg algorithm for enhancing measurement performance in wavelength scanning interferometry

Author(s): Rebecca Woodcock, Hussam Muhamedsalih, Haydn Martin, Xiangqian Jiang
Published in: Surface Topography: Metrology and Properties, 4/2, 2016, Page(s) 024003, ISSN 2051-672X
Publisher: IOP Publishing Ltd
DOI: 10.1088/2051-672X/4/2/024003