Effect of isopropanol on gold assisted chemical etching of silicon microstructures
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Author(s):
L. Romano, J. Vila-Comamala, K. Jefimovs, M. Stampanoni
Published in:
Microelectronic Engineering, Issue 177, 2017, Page(s) 59-65, ISSN 0167-9317
Publisher:
Elsevier BV
DOI:
10.1016/j.mee.2017.02.008
High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
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Author(s):
L. Romano, J. Vila-Comamala, M. Kagias, K. Vogelsang, H. Schift, M. Stampanoni, K. Jefimovs
Published in:
Microelectronic Engineering, Issue 176, 2017, Page(s) 6-10, ISSN 0167-9317
Publisher:
Elsevier BV
DOI:
10.1016/j.mee.2016.12.032
Hot embossing of Au- and Pb-based alloys for x-ray grating fabrication
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Author(s):
Lucia Romano, Joan Vila-Comamala, Helmut Schift, Marco Stampanoni, Konstantins Jefimovs
Published in:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Issue 35/6, 2017, Page(s) 06G302, ISSN 2166-2754
Publisher:
AVS Science and Technology Society
DOI:
10.1116/1.4991807
Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium
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Author(s):
Joan Vila-Comamala, Lucia Romano, Vitaliy Guzenko, Matias Kagias, Marco Stampanoni, Konstantins Jefimovs
Published in:
Microelectronic Engineering, Issue 192, 2018, Page(s) 19-24, ISSN 0167-9317
Publisher:
Elsevier BV
DOI:
10.1016/j.mee.2018.01.027
