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Float zone silicon from electron beam grown rods

Periodic Reporting for period 1 - EBFZ (Float zone silicon from electron beam grown rods)

Berichtszeitraum: 2016-10-01 bis 2017-03-31

fig 2. water cooled tank & EBR growth process #27 (in center), ingot #27 (9,5”)
fig 3. Impurities content in standard FZ (N-HR), EBR (N3-2) and residues melt (N5-2)
fig 1. General silicon technology steps and CHANGES FROM KEPP EU
fig 4. Silicon puller with electron beam heating VU-3 (left) & 8" ingot, archived in VU-3 (right)