Publications Peer reviewed articles (1) Photonic Damascene Process for Low-Loss, High-Confinement Silicon Nitride Waveguides Author(s): Martin Hubert Peter Pfeiffer, Clemens Herkommer, Junqiu Liu, Tiago Morais, Michael Zervas, Michael Geiselmann, Tobias J. Kippenberg Published in: IEEE Journal of Selected Topics in Quantum Electronics, Issue 24/4, 2018, Page(s) 1-11, ISSN 1077-260X Publisher: Institute of Electrical and Electronics Engineers DOI: 10.1109/JSTQE.2018.2808258 Searching for OpenAIRE data... There was an error trying to search data from OpenAIRE No results available
