Periodic Reporting for period 1 - MetalJet (Liquid-metal jet X-ray source for high performance non-destructive testing)
Periodo di rendicontazione: 2017-06-01 al 2017-09-30
Critical Dimension (CD) Metrology has for many years relied on tools based on optical techniques. But as optical tools are running out of steam there is an urgent need for other solutions in order handle the metrology demands for 5nm nodes and below. Various X-ray methods has been proposed such as HRXRD, µXRF and CD-SAXS, but all share one fundamental problem that the X-ray source is too weak to enable sustainable throughput or precision for HVM.
The conclusion is that the novel MetalJet technology developed and commercialised by Excillum could play a key role to improve X-ray metrology tool throughput thereby enabling this metrology technology.