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In-line quality inspection system for smart production of micro and nanoelectronic components

Objective

Future micro/nano-electronics components production will need to be smart and provide instantaneous information on all items for complete traceability. This is necessary as enormous quality requirements have to be met by industrial manufacturers to be competitive in this growing multi-billion market. The crucial ingredient for this development is the availability of rapid in-line-capable inspection systems to unequivocally detect production flaws and defects in the component.

To respond to these challenges, the fast, contactless and non-destructive full-field thermometric methods of Pulse-Infrared Thermography (PIRT) and Thermoreflectance (TR) are exploited for the first time to enable 100% in-line inspection in the production line.

INLINETEST’s objective is to take up these challenges in design, realization, deployment and test:

Existing prototypes for both methods will be adapted and upgraded to the challenges of inline testing, enhanced by hard- and software innovations. For validation under real-life conditions, both failure analytical method’s hard- and software will be customized and integrated into two production lines and demonstrated on two encapsulated power multi-chip module (MCM) components and one in-line production tool at the project partners, covering crucial aspects of the avionics, telecom and automotive sector.

The consortium, composed of five partners from industry, SME and academia from 3 European countries, pools excellence and interdisciplinary skills to address these tasks. We are convinced that INLINETEST will enable the first in-line-capable inspection system for 100% monitoring of micro/nano-electronics production based on the thermographic methods of IR and TR, meet the aggressive precision and efficiency targets presented in the proposal and hence boost productivity and radiate out to other lines and products where non-contact failure analysis below surfaces of various emissivity is needed. Thus, the route for smart production is pre

Call for proposal

H2020-ICT-2016-2017

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Sub call

H2020-ICT-2017-1

Coordinator

BERLINER NANOTEST UND DESIGN GMBH
Net EU contribution
€ 316 750,00
Address
Volmerstrasse 9 B
12489 Berlin
Germany

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Region
Berlin Berlin Berlin
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 135 750,00

Participants (4)

THALES
France
Net EU contribution
€ 475 916,88
Address
Tour Carpe Diem Place Des Corolles Esplanade Nord
92400 Courbevoie

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Region
Ile-de-France Ile-de-France Hauts-de-Seine
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 203 964,37
TECHNISCHE UNIVERSITAET CHEMNITZ
Germany
Net EU contribution
€ 330 250,00
Address
Strasse Der Nationen 62
09111 Chemnitz

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Region
Sachsen Chemnitz Chemnitz
Activity type
Higher or Secondary Education Establishments
Non-EU contribution
€ 0,00
ADVANCED PACKAGING CENTER BV
Netherlands
Net EU contribution
€ 105 000,00
Address
Stenograaf 3
6921 EX Duiven

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Oost-Nederland Gelderland Arnhem/Nijmegen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 45 000,00
BOSCHMAN TECHNOLOGIES BV
Netherlands
Net EU contribution
€ 105 000,00
Address
Stenograaf 3
6921 EX Duiven

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SME

The organization defined itself as SME (small and medium-sized enterprise) at the time the Grant Agreement was signed.

Yes
Region
Oost-Nederland Gelderland Arnhem/Nijmegen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Non-EU contribution
€ 45 000,00