Basic Research for Microsystems Integration
Microsystems, systems that combine microelectronics with micro-engineered components such as sensors, actuators and pumps, are of increasing interest in fields such as medicine and robotics. Market research suggests that by the year 2000 the world market for such technologies will be worth around ECU 5 billion and growing at more than 15% per year. Basic research on technologies, methods and tools undertaken under ESPRIT has helped maintain Europe's capabilities in design and fabrication in this important emerging area. The BARMINT project focused on developing demonstration applications that emphasized the multidisciplinary nature of the technology. A demonstrator has been developed for the consistent delivery of drugs to people suffering from hypertension. A laser scan detection system for a mobile robot has also been developed. The system uses an electrostatically driven micromirror.