Objective
Photomask and reticles are a key enabling technology for the semiconductor industry. Clearly, any photomask defect or blemish will be replicated on the wafer, and without a perfect defect-free reticle exactly matched to the printing technology, viable advanced wafer fabrication is impossible. The prime objective of this project is to provide the necessary materials, equipments and processes required to manufacture advanced transmission photomasks and reticles, and so ensure the manufacturing viability of European semiconductor devices down to 0.35 microns scale. As such the project will relate closely with other European semiconductor development initiatives, notably the JESSI -MST Project T30, Manufacturing Science and Technology.
The principal objectives of TRAM are to:
- develop the transmission mask and reticle technology essential for advanced high density silicon devices (ASIC and standard components)
- provide a commercial cost effective local source of transmission masks and reticles able to satisfy the needs of the general European enterprise
- utilise new materials technologies in the provision of photomasks and reticles to the benefit of the European semiconductor industry through improved yields and improved performance
- strengthen the European equipment manufacturing sector by developing new machines targeted for specialist large area applications and world markets
- develop new processes and methods to improve the quality, yield and cycle time required to produce photomasks and reticles, including design data processing.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences physical sciences electromagnetism and electronics semiconductivity
- natural sciences chemical sciences inorganic chemistry metalloids
- natural sciences computer and information sciences data science data processing
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
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Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
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Coordinator
KY7 4NT Glenrothes
United Kingdom
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.