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Area-selective Deposition-enabled ultiMAte extensIon of lithogRaphy

Project description

Area selective deposition for advanced nanopatterning

Coordinator

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Net EU contribution
€ 166 320,00
Address
Kapeldreef 75
3001 Leuven
Belgium

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Region
Vlaams Gewest Prov. Vlaams-Brabant Arr. Leuven
Activity type
Research Organisations
Non-EU contribution
€ 0,00