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Area-selective Deposition-enabled ultiMAte extensIon of lithogRaphy

Project description

Area selective deposition for advanced nanopatterning

Call for proposal

H2020-MSCA-IF-2019
See other projects for this call

Funding Scheme

MSCA-IF-EF-ST - Standard EF

Coordinator

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Address
Kapeldreef 75
3001 Leuven
Belgium
Activity type
Research Organisations
EU contribution
€ 166 320