Project description
A novel approach to the bottom-up fabrication of nanoelectronics
Bottom-up approaches to nanofabrication use chemical or physical forces operating at the nanoscale to assemble basic units into larger structures. The EU-funded BottomUp3D project plans to develop innovative approaches to the bottom-up synthesis of nanoelectronics. The focus will be on area-selective atomic layer deposition (ALD), a technique that has the potential to become the new paradigm of bottom-up processing as it enables synthesis control with atomic-scale precision. New advances in nanoelectronics and quantum computing require the fabrication of 3D nanostructured devices. Therefore, the project's work will go beyond state-of-the-art area-selective ALD techniques, which process planar substrates, and focus on the fabrication of 3D substrates.
Fields of science
Programme(s)
Topic(s)
Funding Scheme
ERC-STG - Starting Grant
Host institution
5612 AE Eindhoven
Netherlands
See on map
Beneficiaries (1)
5612 AE Eindhoven
See on map