Project description
A novel approach to the bottom-up fabrication of nanoelectronics
Bottom-up approaches to nanofabrication use chemical or physical forces operating at the nanoscale to assemble basic units into larger structures. The EU-funded BottomUp3D project plans to develop innovative approaches to the bottom-up synthesis of nanoelectronics. The focus will be on area-selective atomic layer deposition (ALD), a technique that has the potential to become the new paradigm of bottom-up processing as it enables synthesis control with atomic-scale precision. New advances in nanoelectronics and quantum computing require the fabrication of 3D nanostructured devices. Therefore, the project's work will go beyond state-of-the-art area-selective ALD techniques, which process planar substrates, and focus on the fabrication of 3D substrates.
Objective
It is a long held dream in nanoscience to synthesize materials from the bottom-up with atomic-level control of structure and properties, yet the fabrication of nanoelectronics still relies completely on top-down processing. Innovative schemes for bottom-up fabrication will be realized in this project by developing approaches for area-selective atomic layer deposition (ALD), a technique that has the potential to become the new paradigm of bottom-up processing because of its atomic-scale control. Current work on area-selective ALD focuses on the processing of planar substrates, while emerging developments in nanoelectronics and quantum computing require the fabrication of 3D nanostructured devices.
Building on recent innovations in my lab, a multidisciplinary approach to area-selective ALD will be employed which combines vapor-phase dosing of inhibitor molecules as a chemical method and the exposure to directional ions from a plasma as a physical method. Fundamental understanding of the mechanisms of chemical inhibition will be acquired, and a new strategy for physical removal of defects will be developed. These methods will be employed on 3D substrates to enable the fabrication of future device structures. By bringing inhibitor molecules and the directional nature of plasma ions together, new flavors of selective processing will be invented including anisotropic or topographically-selective ALD, which opens up a new direction for the field of area-selective ALD.
The synergy between my extensive expertise with in-situ reaction mechanism studies and plasma processing, my leading role in the field of area-selective ALD, and the groups unique facilities for atomic-scale processing, offers a stepping stone to the long-awaited shift from top-down to bottom-up processing. Moreover, this work will allow for the scaling of electronics down to the single-nanometer level.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
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Keywords
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
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H2020-EU.1.1. - EXCELLENT SCIENCE - European Research Council (ERC)
MAIN PROGRAMME
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Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
ERC-STG - Starting Grant
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Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
(opens in new window) ERC-2020-STG
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Net EU financial contribution. The sum of money that the participant receives, deducted by the EU contribution to its linked third party. It considers the distribution of the EU financial contribution between direct beneficiaries of the project and other types of participants, like third-party participants.
5612 AE Eindhoven
Netherlands
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.