Exploitable results
Hybrid inorganic-organic polymers (ORMOCERs) have been developed and tested for evaluation in MCM applications. The photopatternable materials with negative resist behaviour are composed of inorganic oxide structures cross-linked or substituted by organic groups. They are prepared from organosilane precursors by sol-gel-processing in combination with organic cross-linking of polymerizable organic functions. As a result of these functionality the properties of the ORMOCERs can be adjusted to particular applications. Systematic variation of composition combined with adaptation to micro system technology allows great flexibility in processing. Some features of these materials are:
- Post-baking at moderate temperatures (120 C - 170 C) enables processing on substrates such as FR-4 and BT.
- Combined use as dielectric and passivation layers in electrical systems and devices as well as core and cladding for optical applications enables e/o applications with high integration levels.
- Easily adaptable to thin film technology: spin-on with planarization >90% and via diameters down to 20 µm have been achieved.
A selection of relevant material properties is given below:
Electrical properties:
- permittivity ?R at 10 kHz = 3.2
- dielectric loss at 1MHz is tan (?) = 0.004
- volume resistivity RD ? 1016 ?cm
Optical properties:
- optical loss ? = 0.23 dB/cm at 1310 nm (not fluorinated!)
- refractive index (at 588 nm) = 1.52-1.56 (primary index tuning range)
Thermal stability:
- Despite the material's moderate curing temperatures, it withstands standard metallization and soldering processes.
On various substrate materials, multi-layer structures (e.g. 5 conducting and 4 dielectric layers) focusing on different applications were demonstrated. Single-mode as well as multi-mode-type waveguides were manufactured and characterized.
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