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CONTINUOUS ATMOSPHERIC IN LINE AEROSOL CVD AT LOW TEMPERATURES

Ziel


The most important achievements are related to the production of coating materials with minimal thermal load for the product to be coated with the new coating process, and the development of coating modules allowing uniform in-line deposition for industrial applications.
The proposed project aims to develop an in-line atmospheric CVD technique capable of depositing a great variety of predominantly oxides at desposition temperatures down to a temperature range of 20-15O C. The deposition of the layers will be carried out on flat, curved and 3-dimensionally shaped surfaces. The principle of the proposed technique is based on a new way of preparing and activating starting materials for CVD and subsquent post-treatment of the deposited material. The starting materials are simply solved in a suitable solvent resulting in a sol-gel: for this reason an enormous variety of starting materials can be accounted for.

The sol-gel is ultrasonically evaporated into an aerosol condition and the resulting aerosolgel is transported to the deposition chamber. Coatings on curved and 3-dimensionally shaped surfaces can be deposited by manipulating the injector geometry and the "gas" flow distribution.

The following R&D tasks will be carried out:

-development of evaporation and supply techniques based on aerosols
-development of post-treatment techniques for densification of the deposited coatings on glass, plastic and polymer substrate materials
-deposition processes for optical coatings on flat, curved and 3D forms
-multilayer deposition experiments and characterization of the deposited material.

The advantages of the deposition processes resulting from this proposal are: No limitations for substrates, in form, dimensions and nature. Fast, more than 50 products/hr and cost-effective deposition processes:65% reduction of coatings costs compared to evaportion. Optical products with standard, improved or new optical properties.

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PHILIPS BV
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