Objective
The research project has three scientific and technical objectives :
- The development of in-situ plasma diagnostics of powders associated with some ex-situ characterization
- fundamental understanding of the kinetics of formation and dynamics of trapping of powders in plasmas of reactive gases (hydrides : Si4, NH3 and fluorides : CF4, CF2Cl2, SF6)
- development of costless monitoring methods and guidelines for operation of discharge reactors either for minimizing particulate contamination in plasma-surface processing or for optimizing powder size and yield.
Several in situ diagnostics have been implemented on 5 radiofrequency (RF) (13.56 MHz) and very high frequency (VHF) (100 MHz) discharge reactors:
laser mie scattering of powders (size 0.1 to greater than 10 um) calibrated by ex situ measurements by electron microscopy;
emission spectroscopy (spatially and time resolved) and RF discharge current and power measurements;
laser photodetachment of negative ions and negatively charged particulates or powders;
in situ ellipsometry on the surface of a material to analyse the contamination by powders.
The basis of the control of powder size and yield is to operate RF discharges in a pulsed mode (100Hz-10kHz) to allow detrapping of negatively charged particulates.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- engineering and technology electrical engineering, electronic engineering, information engineering information engineering telecommunications radio technology radio frequency
- natural sciences physical sciences optics spectroscopy emission spectroscopy
- natural sciences physical sciences optics microscopy electron microscopy
- natural sciences physical sciences optics laser physics
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
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Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
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Coordinator
91128 PALAISEAU
France
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.