Ambient temperature deposition of hard Diamond-like carbon Coatings

Informazioni relative al progetto

DIAMCO

ID dell’accordo di sovvenzione: BRPR980749

Progetto chiuso

Data di avvio 1 Ottobre 1998

Data di completamento 31 Gennaio 2002

Finanziato da

• Specific research and technological development programme in the field of industrial and materials technologies, 1994-1998

Costo totale

Nessun dato

Contributo UE

Nessun dato

Coordinato da

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
France

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Risultati sfruttabili

Ambient temperature deposition of hard diamond-like carbon coatings

A pre-industrial prototype of a plasma reactor operating in a Distributed Electron Cyclotron Resonance (DECR) configuration and corresponding processing routes have been successfully designed and developed for ambient temperature deposition of diamond-like carbon (DLC) protective coatings on large area, thermally sensitive substrates. Unambiguous and physically sound relationships between the processing parameters specific to this machine and the physical properties of the DLC coatings were established initially and the research subsequently focused on reaching a better understanding of the fundamental properties of the DLC thin films. A low energy, high current electron gun has been developed in an attempt to combine plasma processing with polarisation of thick dielectric substrates by fast electron injection. The new electron gun produces substrate electron current densities of 1mA/cm² and enables well controlled biasing of dielectric substrates whatever their thickness or shape. Substantial progress has been accomplished in understanding the nucleation and growth processes. New light was shed on the role of energy density deposited in elastic collision cascades and its impact on the nucleation dynamics. Physical mechanisms responsible of carbon and hydrogen incorporation were analysed in detail. Interaction between external and intrinsic stress fields and their impact on the DLC microstructure, hybridisation and optoelectronic properties has been demonstrated. Stress mediated nucleation was shown to lead to formation of auto-correlated nano-structured DLC films. Process-induced defects have been identified for specific demonstrators and correlated to the process parameters. Ways around these problems have been found. Successful demonstrators included coated plastic optical components for use in sunglasses and helmet visors. These demonstrated superior scratch resistance, decorative added value and excellent stability and durability. A further demonstrator significantly enhanced the moisture resistance of microelectronic assemblies and hence their reliability. This work is continuing as an industrial development and promoted novel industrial applications. Innovative aspects of the DECR equipment may now be incorporated into commercial equipment.