Objective
Metal organic Chemical Vapour deposition (MOCVD) is a key manufacturing process for microelectronic and optic-electronic devices. However, in a MOCVD production process the deposition process is not monitorable, nor due to a lack of in-process mononitoring closed loop controllable. We focus on in site monitoring of the MOCVD process for the two material systems, which are the industrially most requested: alternary and quaternary {al , ga , in} -{as , p sb} semi conductors for optical communication applications and b) on gallium nitride (GAN) and related materials, which have promising applications for blue laser diodes, high power microwave semi conductor devices ect. This project aims on using, improving, combining and developing real time monitoring techniques and closed loop feedback control of epitaxial growth, where the sensors in site used are purely optical ones, compatible with different industrially used MOCVD growth systems.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- engineering and technology mechanical engineering manufacturing engineering
- natural sciences chemical sciences inorganic chemistry post-transition metals
- engineering and technology electrical engineering, electronic engineering, information engineering electronic engineering sensors
- natural sciences physical sciences optics laser physics
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
AACHEN
Germany
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.