Spatially resolved subsurface characterization of semiconductor wafers by high resolution x-ray diffraction

Project Information

DUSAN KORYTAR

Grant agreement ID: G5TR-CT-2000-00046

Project closed

Start date 28 February 2001

End date 27 February 2002

Funded under

• Programme for research technological development and demonstration on "Competitive and sustainable growth 1998-2002"

Total cost € 128 000,00

EU contribution € 128 000,00

Coordinated by

FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany

Objective

The main knowledge and technology to be transferred is the applicant's experience in characterization of grown-in and process-induced defects and stresses in semiconductors by means of X-ray diffraction techniques and his potential to contribute significantly to the research of surface damage depth profiling and lateral mapping after wafer surface preparation. His multiple beam diffracting technique can be useful base for the development of new techniques related to subsurface damage profiling and characterization and understanding of stresses and defects generation and treatment in semiconductor wafers.

Fields of science (EuroSciVoc)

CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques.

• natural sciences › physical sciences › electromagnetism and electronics › semiconductivity

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Programme(s)

• FP5-GROWTH - Programme for research technological development and demonstration on "Competitive and sustainable growth 1998-2002"

Topic(s)

• 1.1.3.-5. - RTD Activities of a Generic Nature : materials and their technologies for production and transformation and new and improved materials and production technologies in the steel field

Call for proposal

Data not available

Funding Scheme

RGI - Research grants (individual fellowships)

Coordinator

FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

• EU contribution: No data
• Address: Krügerstraße 22 ; 01326 WEISSIG - DRESDEN ; Germany
• Total cost: No data