Objective
The oxygen content of silicon is an important parameter for the manufacturing of integrated circuits and other electronic devices. The measurements are based on infrared absorption spectrometry. Results of infrared absorption measurement often differ by several percent between different laboratories. Industry has therefore requested the BCR programme to produce silicon reference materials (zero specimens needed in the measurements as well as samples to check infrared spectrometers).
RESULTS
Intercomparisons have been organized to improve the measurements of the actual oxygen content and of the infrared absorption.
Two reference materials have been certified.
CRM 368: silicon with very low 0 content, to be used as "zero"
specimens: 69 +/- 19 ng/g
Certification report: EUR 12927 (1990)
CRM 369: silicon with 0 contents in the range of industrial interest, for testing the accuracy (photometry + software) or the IR Instruments:
absorption coefficients in the range 2.2 - 3.8 cm{-1}
oxygen contents in the range 8 - 13 ug/g
Certification report : EUR 12928 (1991)
Fields of science
Topic(s)
Data not availableCall for proposal
Data not availableFunding Scheme
CSC - Cost-sharing contractsCoordinator
OX11 0RA Didcot
United Kingdom
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Participants (16)
Orleans
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28100 Novara
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PARIS
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12205 BERLIN
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SW7 2AZ London
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Gent
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60486 Frankfurt am Main
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Geel
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Gent
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44139 Dortmund
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SO Southampton
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Great Malvern
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81739 München
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74072 Heilbronn
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RG6 6AF READING / SILCHESTER
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84489 Burghausen
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