Community Research and Development Information Service - CORDIS

H2020

TAKE5

Project ID: 692522
Funded under

Technology Advances and Key Enablers for 5 nm

From 2016-04-01 to 2019-03-31, ongoing project

Project details

Total cost:

EUR 150 046 979,75

EU contribution:

EUR 28 364 030,78

Coordinated in:

Netherlands

Call for proposal:

H2020-ECSEL-2015-2-IA-two-stageSee other projects for this call

Funding scheme:

ECSEL-IA - ECSEL Innovation Action

Objective

Deliverables

Deliverables not available

Publications

  • Enabling Moore’s Law to 2025 and Beyond
    Author(s): Peter Jenkins
  • Modeling of Tone Inversion Process Flow for N5 Interconnect to Characterize Block Tip to Tip
    Author(s): S. Guissi, W. F. Clark, A. Junker, J. Ervin, K. Greiner, D. Fried, B. Briggs, K. Devriendt, F. Sebaai, A. Charley, C. J. Wilson, J. Boemmels, Z. Tőkei
    Published in: Proceedings of IEEE IITC INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2017. 

Coordinator

ASML NETHERLANDS B.V.
Netherlands

EU contribution: EUR 9 450 000


DE RUN 6501
5504DR VELDHOVEN
Netherlands
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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Participants

APPLIED MATERIALS ISRAEL LTD
Israel

EU contribution: EUR 2 081 250


OPPENHEIMER STREET 9
76705 REHOVOT
Israel
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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ASM BELGIUM NV
Belgium

EU contribution: EUR 58 300,88


KAPELDREEF 75
3001 HEVERLEE
Belgium
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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COVENTOR SARL
France

EU contribution: EUR 387 156


AVENUE DU QUEBEC 3
91140 VILLEBON SUR YVETTE
France
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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FEI ELECTRON OPTICS BV
Netherlands

EU contribution: EUR 559 050


ACHTSEWEG NOORD GEBOUW AAE 5
5651 GG EINDHOVEN
Netherlands
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany

EU contribution: EUR 123 268,50


HANSASTRASSE 27C
80686 MUNCHEN
Germany
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Activity type: Research Organisations
Administrative contact: Andrea Zeumann
Tel.: +49 89 1205 2723
Fax: +49 89 1205 7534

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INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium

EU contribution: EUR 9 000 126


KAPELDREEF 75
3001 LEUVEN
Belgium
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Activity type: Research Organisations
Administrative contact: Christine Van Houtven
Tel.: +32 16 28 16 13

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BRUKER JV ISRAEL LTD
Israel

EU contribution: EUR 662 250


6 HAMECHKAR STREET RAMAT GAVRIEL INDUSTRIAL ZONE
2306990 MIGDAL HAEMEK
Israel
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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KLA-TENCOR CORPORATION (ISRAEL)
Israel

EU contribution: EUR 901 379,40


HATIKSHORET ST.
23100 MIGDAL HAEMEK
Israel
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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LAM RESEARCH BELGIUM
Belgium

EU contribution: EUR 41 250


KAPELDREEF 75
3001 LEUVEN
Belgium
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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NOVA MEASURING INSTRUMENTS LTD
Israel

EU contribution: EUR 1 500 000


WEIZMANN SCIENCE PARK BUILDING 22
76100 REHOVOT
Israel
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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CARL ZEISS SMT GMBH
Germany

EU contribution: EUR 3 600 000


RUDOLF EBER STRASSE 2
73447 OBERKOCHEN
Germany
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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