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Publications
Author(s): L. Romano, J. Vila-Comamala, K. Jefimovs, M. Stampanoni
Published in: Microelectronic Engineering, 177, 2017, Page(s) 59-65, ISSN 0167-9317
Publisher: Elsevier BV
DOI: 10.1016/j.mee.2017.02.008
Author(s): L. Romano, J. Vila-Comamala, M. Kagias, K. Vogelsang, H. Schift, M. Stampanoni, K. Jefimovs
Published in: Microelectronic Engineering, 176, 2017, Page(s) 6-10, ISSN 0167-9317
Publisher: Elsevier BV
DOI: 10.1016/j.mee.2016.12.032
Author(s): Lucia Romano, Joan Vila-Comamala, Helmut Schift, Marco Stampanoni, Konstantins Jefimovs
Published in: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 35/6, 2017, Page(s) 06G302, ISSN 2166-2754
Publisher: AVS Science and Technology Society
DOI: 10.1116/1.4991807
Author(s): Joan Vila-Comamala, Lucia Romano, Vitaliy Guzenko, Matias Kagias, Marco Stampanoni, Konstantins Jefimovs
Published in: Microelectronic Engineering, 192, 2018, Page(s) 19-24, ISSN 0167-9317
Publisher: Elsevier BV
DOI: 10.1016/j.mee.2018.01.027
Author(s): Konstantins Jefimovs, Lucia Romano, Joan Vila-Comamala, Matias Kagias, Zhentian Wang, Li Wang, Christian Dais, Harun Solak, Marco Stampanoni
Published in: Advances in Patterning Materials and Processes XXXIV, 2017, Page(s) 101460L
Publisher: SPIE
DOI: 10.1117/12.2258007