Skip to main content
European Commission logo
English English
CORDIS - EU research results
CORDIS
CORDIS Web 30th anniversary CORDIS Web 30th anniversary

Metal Assisted chemical etching of Gratings for X-ray InterferometriC systems

CORDIS provides links to public deliverables and publications of HORIZON projects.

Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Publications

Effect of isopropanol on gold assisted chemical etching of silicon microstructures

Author(s): L. Romano, J. Vila-Comamala, K. Jefimovs, M. Stampanoni
Published in: Microelectronic Engineering, Issue 177, 2017, Page(s) 59-65, ISSN 0167-9317
Publisher: Elsevier BV
DOI: 10.1016/j.mee.2017.02.008

High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication

Author(s): L. Romano, J. Vila-Comamala, M. Kagias, K. Vogelsang, H. Schift, M. Stampanoni, K. Jefimovs
Published in: Microelectronic Engineering, Issue 176, 2017, Page(s) 6-10, ISSN 0167-9317
Publisher: Elsevier BV
DOI: 10.1016/j.mee.2016.12.032

Hot embossing of Au- and Pb-based alloys for x-ray grating fabrication

Author(s): Lucia Romano, Joan Vila-Comamala, Helmut Schift, Marco Stampanoni, Konstantins Jefimovs
Published in: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Issue 35/6, 2017, Page(s) 06G302, ISSN 2166-2754
Publisher: AVS Science and Technology Society
DOI: 10.1116/1.4991807

Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium

Author(s): Joan Vila-Comamala, Lucia Romano, Vitaliy Guzenko, Matias Kagias, Marco Stampanoni, Konstantins Jefimovs
Published in: Microelectronic Engineering, Issue 192, 2018, Page(s) 19-24, ISSN 0167-9317
Publisher: Elsevier BV
DOI: 10.1016/j.mee.2018.01.027

High-aspect ratio silicon structures by displacement Talbot lithography and Bosch etching

Author(s): Konstantins Jefimovs, Lucia Romano, Joan Vila-Comamala, Matias Kagias, Zhentian Wang, Li Wang, Christian Dais, Harun Solak, Marco Stampanoni
Published in: Advances in Patterning Materials and Processes XXXIV, 2017, Page(s) 101460L
Publisher: SPIE
DOI: 10.1117/12.2258007

Searching for OpenAIRE data...

There was an error trying to search data from OpenAIRE

No results available