Community Research and Development Information Service - CORDIS

H2020

TAPES3

Project ID: 783247
Funded under

Technology Advances for Pilotline of Enhanced Semiconductors for 3nm

From 2018-10-01 to 2021-09-30, ongoing project

Project details

Total cost:

EUR 123 594 178,44

EU contribution:

EUR 28 196 295,22

Coordinated in:

Netherlands

Topic(s):

ECSEL-2017-1 - IA

Call for proposal:

H2020-ECSEL-2017-1-IA-two-stageSee other projects for this call

Funding scheme:

ECSEL-IA - ECSEL Innovation Action

Objective

Coordinator

ASML NETHERLANDS B.V.
Netherlands

EU contribution: EUR 7 569 012


DE RUN 6501
5504DR VELDHOVEN
Netherlands
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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Participants

APPLIED MATERIALS BELGIUM
Belgium

EU contribution: EUR 190 167,78


KAPELDREEF 75 Bus C1
3001 LEUVEN
Belgium
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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APPLIED MATERIALS ISRAEL LTD
Israel

EU contribution: EUR 1 462 650


OPPENHEIMER STREET 9
76705 REHOVOT
Israel
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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ADVANCED MASK TECHNOLOGY CENTER GMBH & CO KG
Germany

EU contribution: EUR 80 487,75


RAHNITZER ALLEE 9
01330 DRESDEN
Germany
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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COVENTOR SARL
France

EU contribution: EUR 358 802,50


AVENUE DU QUEBEC 3
91140 VILLEBON SUR YVETTE
France
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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DEMCON ADVANCED MECHATRONICS BV
Netherlands

EU contribution: EUR 344 999,98


INSTITUTENWEG 25
7521 PH ENSCHEDE
Netherlands
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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FEI ELECTRON OPTICS BV
Netherlands

EU contribution: EUR 820 654


ACHTSEWEG NOORD GEBOUW AAE 5
5651 GG EINDHOVEN
Netherlands
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany

EU contribution: EUR 387 050,13


HANSASTRASSE 27C
80686 MUNCHEN
Germany
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Activity type: Research Organisations

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ION BEAM SERVICES
France

EU contribution: EUR 274 096,20


RUE GASTON IMBERT PROLONGEE
13790 ROUSSET
France
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium

EU contribution: EUR 6 175 448,74


KAPELDREEF 75
3001 LEUVEN
Belgium
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Activity type: Research Organisations

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INSTITUT FUER MIKROELEKTRONIK STUTTGART
Germany

EU contribution: EUR 867 464,15


ALLMANDRING STRASSE 30A
70569 STUTTGART
Germany
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Activity type: Research Organisations

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JSR MICRO NV
Belgium

EU contribution: EUR 92 061


TECHNOLOGIELAAN 8
3001 LEUVEN
Belgium
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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KLA-TENCOR CORPORATION (ISRAEL)
Israel

EU contribution: EUR 346 185


HATIKSHORET ST.
23100 MIGDAL HAEMEK
Israel
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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LAM RESEARCH AG
Austria

EU contribution: EUR 1 079 510


SEZ-STRASSE 1
9500 VILLACH
Austria
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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MENTOR GRAPHICS BELGIUM
Belgium

EU contribution: EUR 183 675


LIVOURNE 7, BOITE 4
1060 BRUSSELS
Belgium
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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NOVA MEASURING INSTRUMENTS LTD
Israel

EU contribution: EUR 943 250


WEIZMANN SCIENCE PARK BUILDING 22
76100 REHOVOT
Israel
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
United Kingdom

EU contribution: EUR 29 735,50


TUBNEY WOODS
OX13 5QX ABINGDON
United Kingdom
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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OPTIX FAB GMBH
Germany

EU contribution: EUR 168 437,50


HANS KNOLL STR 6
07745 JENA
Germany
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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PAUL SCHERRER INSTITUT
Switzerland

EU contribution: EUR 134 952,07


.
5232 VILLIGEN PSI
Switzerland
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Activity type: Research Organisations
Administrative contact: Irene Walthert
Tel.: +41 56 3102664

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PHYSIKALISCH-TECHNISCHE BUNDESANSTALT
Germany

EU contribution: EUR 187 395,90


Bundesallee 100
38116 BRAUNSCHWEIG
Germany
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Activity type: Research Organisations

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RECIF TECHNOLOGIES
France

EU contribution: EUR 92 602,19


rue des briquetiers 9
31700 Blagnac
France
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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RHEINISCH-WESTFAELISCHE TECHNISCHE HOCHSCHULE AACHEN
Germany

EU contribution: EUR 169 905,91


TEMPLERGRABEN 55
52062 AACHEN
Germany
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Activity type: Higher or Secondary Education Establishments

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SILTRONIC AG
Germany

EU contribution: EUR 515 888,17


HANNS SEIDEL PLATZ 4
81737 MUNCHEN
Germany
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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SUSS MicroTec Photomask Equipment GmbH & Co. KG
Germany

EU contribution: EUR 135 867,75


Ferdinand-von-Steinbeis-Ring 10
75447 Sternenfels
Germany
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Netherlands

EU contribution: EUR 694 393


ANNA VAN BUERENPLEIN 1
2595 DA DEN HAAG
Netherlands
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Activity type: Research Organisations

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VDL ETG TECHNOLOGY & DEVELOPMENT BV
Netherlands

EU contribution: EUR 891 603


ACHTSEWEG NOORD 5
5651 GG EINDHOVEN
Netherlands
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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CARL ZEISS SMT GMBH
Germany

EU contribution: EUR 4 000 000


RUDOLF EBER STRASSE 2
73447 OBERKOCHEN
Germany
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Activity type: Private for-profit entities (excluding Higher or Secondary Education Establishments)

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