Objective
Main objective of the IP "SEA-NET" is to validate emerging semiconductor manufacturing equipment for the 65nm - 22nm nodes, together with advances in equipment for cleaning/etch, handling, metrology/ analysis, modelling/APC and production control for Nanoelectronic CMOS.
SEA-NET will strengthen the European equipment industry in a sustainable way by combining advanced RandD with equipment sub-projects involving a wide community of equipment suppliers, users and research institutes. The selection of additional projects will be done in a "competitive call" starting after 12 months.
The equipment companies involved have a high proportion of SMEs who will benefit from their involvement with such organisations and the credibility that results.
Joint RandD including; advanced process control capabilities, enhanced wafer and equipment logistics, virtual equipment engineering compliance and control of communication interfaces. Applications will be evaluated for FEOL, BEOL that will improve equipment manufacturing and design criteria thus impacting equipment perfomance and time to maturity. All this will provide "progress beyond the current state-of-the-art" and lead to cost effective equipment development.
Each sub-project will be refined for the progressively emerging technology nodes. This will be done by optimizing the inputs from ITRS and the user requirements as identified within SEA-NET and will provide the benchmark for the assessment metrics.
A powerful and flexible management structure is identified for this IP, which has high numbers of; sub-projects, assessment sites, SME's and users from both, IC-industry and industrially oriented research institutions. The management is structured at the Integrated Project and Sub-Project level.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques.
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Topic(s)
Call for proposal
Data not availableFunding Scheme
IP - Integrated ProjectCoordinator
79108 MÜNCHEN
Germany
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Participants (26)
52072 AACHEN
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89143 BLAUBEUREN
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75015 PARIS CEDEX 15
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78315 RADOLFZELL
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23560 LUEBECK
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4782 ST. FLORIAN AM INN
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2700 WIENER NEUSTADT
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81379 MUENCHEN
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81726 MUENCHEN
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VILLACH
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13790 ROUSSET
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07745 JENA
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23100 MIGDAL HAEMEK
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35452 HEUCHELHEIM
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LEUVEN
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38920 CROLLES
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EINDHOVEN
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OX13 5QX ABINGDON - OXON
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01099 DRESDEN
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82024 TAUFKIRCHEN
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38190 BERNIN
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1117 BUDAPEST
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9500 VILLACH
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63796 KAHL AM MAIN
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38920 CROLLES
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