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ATTOsecond Spectro-microscopies for Photoresist Improvement and Efficacy

Project description

Novel metrology techniques support advanced chip manufacture

Call for proposal

H2020-MSCA-IF-2020
See other projects for this call

Coordinator

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Address
Kapeldreef 75
3001 Leuven
Belgium
Activity type
Research Organisations
EU contribution
€ 166 320