ATTOsecond Spectro-microscopies for Photoresist Improvement and Efficacy

Project Information

ATTO-SPIE

Grant agreement ID: 101031245

DOI

10.3030/101031245

Project terminated on 31 March 2023

EC signature date 25 February 2021

Start date 1 June 2021

End date 31 May 2023

Funded under

• EXCELLENT SCIENCE - Marie Skłodowska-Curie Actions

Total cost

€ 166 320,00

EU contribution

€ 166 320,00

Coordinated by

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium

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Publications

Conference proceedings (2)

Actinic inspection of the EUV optical parameters of lithographic materials with lab-based radiometry and reflectometry

Author(s): Kevin M. Dorney, Nicola N. Kissoon, Fabian Holzmeier, Esben W. Larsen, Dhirendra P. Singh, Shikhar Arvind, Sayantani Santra, Roberto Fallica, Igor Makhotkin, Vicky Philipsen, Stefan De Gendt, Claudia Fleischmann, Paul A. W. van der Heide, John S. Petersen
Published in: Proceedings of SPIE, Volume 12494, Optical and EUV Nanolithography XXXVI, Issue 12494, 2023, 2023, Page(s) 1249407
Publisher: SPIE
DOI: 10.1117/12.2658359

A scientific framework for establishing ultrafast molecular dynamic research in imec's AttoLab

Author(s): Laura Galleni, Faegheh S. Sajjadian, Theirry Conard, Ivan Pollentier, Kevin M. Dorney, Fabian Holzmeier, Esben Witting Larsen, Daniel Escudero, Geoffrey Pourtois, Michiel J. van Setten, Paul van der Heide, John S. Petersen
Published in: Proceedings of SPIE, Volume 12498, Advances in Patterning Materials and Processes XL, Issue 124980W, 2023, 2023, Page(s) 124980W
Publisher: SPIE
DOI: 10.1117/12.2660047