Project description
Compact advanced X-ray metrology instrument
The demand for semiconductor devices, low-power electronics, electric vehicles, sensors and the Internet of Things has driven the development of new thin film materials. Scientists employ X-rays, studying their crystal properties and establishing correlations with their electronic characteristics. Recently, Sirius X-ray Solutions introduced XRS SEMI, a compact, advanced X-ray metrology instrument featuring a newly developed X-ray optic and a state-of-the-art detector. The EU-funded Next Gen XRM project will use XRS SEMI for evaluating the crystalline structure of thin film materials. As part of the WomenTechEU programme, Sirius X-ray Solutions will finalise and integrate a software toolbox based on machine learning and theoretical model simulation into the Sirius XRS platform to enhance its analytical performance.
Objective
Due to increased demand for semiconductor devices, low-power electronics, electric vehicles, sensors, IoT (Internet of things), new complex thin film materials are constantly engineered by sophisticated MBE (molecular beam epitaxy), PVD (physical vapour deposition) or ALD (atomic layer deposition). X-rays are well suited to assess the crystalline structure of new thin film materials due to the intrinsic properties of X-rays to probe material on the sub-nanometer scale. These crystal properties (film thickness, composition, strain, stress, interdiffusion and epitaxial relation) are then correlated to the electronic properties.
Sirius X-ray Solutions is an innovative German SME with the mission to develop and manufacture high-performance customised X-ray instrumentation for semiconductor and material characterisation applications.
After years of R&D, it has developed XRS SEMI, a compact (1m x 1m) advanced X-ray metrology instrument, which combines a newly developed X-ray optic, state-of-the-art detector, fast control software and fast, accurate data analysis software. XRS SEMI is used to assess the crystalline structure of new thin film materials due to the intrinsic properties of X-rays to probe material on the sub-nanometer scale. XRS SEMI has been sold and validated to prestigious research institutions and innovative SMEs such as the Fraunhofer Institute for Photonic Microsystems, the University of Leuven, Lumiphase AG and Soitec. The X-ray metrology instrument, developed by SIRIUS, can measure at least 10 times faster than the competition, with a selling price 2 times lower. It addresses the growing niche market (200mm wafers) within the semiconductor market of X-ray metrology for MEMS, photonics and sensors.
Within the WomenTechEU programme Sirius X-ray Solutions will finalise and integrate the software toolbox, based on machine learning and theoretical models' simulation, into the Sirius XRS platform to optimise the software's analytical performance.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences computer and information sciences internet internet of things
- natural sciences computer and information sciences software
- engineering and technology electrical engineering, electronic engineering, information engineering electronic engineering sensors
- natural sciences physical sciences electromagnetism and electronics semiconductivity
You need to log in or register to use this function
We are sorry... an unexpected error occurred during execution.
You need to be authenticated. Your session might have expired.
Thank you for your feedback. You will soon receive an email to confirm the submission. If you have selected to be notified about the reporting status, you will also be contacted when the reporting status will change.
Keywords
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
-
HORIZON.3.2 - European innovation ecosystems
MAIN PROGRAMME
See all projects funded under this programme
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
HORIZON-CSA - HORIZON Coordination and Support Actions
See all projects funded under this funding scheme
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
(opens in new window) HORIZON-EIE-2022-SCALEUP-02
See all projects funded under this callCoordinator
Net EU financial contribution. The sum of money that the participant receives, deducted by the EU contribution to its linked third party. It considers the distribution of the EU financial contribution between direct beneficiaries of the project and other types of participants, like third-party participants.
73230 Kirchheim Unter Teck
Germany
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.