Resist materials for transition to green processing in semiconductor industry

Project Information

RESIN GREEN

Grant agreement ID: 101135783

DOI

10.3030/101135783

EC signature date 25 October 2023

Start date 1 January 2024

End date 30 June 2027

Funded under

• Digital, Industry and Space

Total cost

€ 3 777 574,50

EU contribution

€ 3 777 574,50

Coordinated by

"NATIONAL CENTER FOR SCIENTIFIC RESEARCH ""DEMOKRITOS"""
Greece

CORDIS provides links to public deliverables and publications of HORIZON projects.

Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Publications

Conference proceedings (1)

Novel nanopositioning system with improved range, dynamics and accuracy

Author(s): Jan Thiesler, Harry Marth, Michael Schröder, Gaoliang Dai
Published in: 2025
Publisher: euspen’s 25th International Conference & Exhibition