Objective
The transcription of CAD data to the physical layer of reticles, masks, or semiconductor substrates is done by postprocessor software that transfers the hierarchical CAD file into a machine format. Existing software explodes the data to a flat file, and with current techniques machine format file sizes extend to gigabytes and processing time stretches into weeks. In addition, as feature sizes become smaller, it is necessary to cope with the proximity effect in order to maintain critical dimensions.
The objective of VIP is to replace existing postprocessors by a product which retains hierarchies during data manipulation. The goal is to process memories (minimum 64 Mbit), ASICs (minimum 500K gate arrays), integrated optics devices and microsensors, building on the experience that one of the contractors has with computer-aided proximity correction. A particularly challenging target is the computation of a 64 Mbit DRAM on a mini-computer in less than 8 hours.
Graphical user interfaces have been defined for all types of software platforms in use, and data input formats obtained for commonly available e-beam writing systems. This tool also enhances data manipulation and improves productivity through the use of macros. Experiments have been conducted to understand the proximity effects when writing small lines, and the results are used to provide intelligent tuning of the proximity correction feature. Work on curve drawing features is being applied to allow writing of integrated optical elements.
Initial trials of the postprocessor data fracturing show huge savings in processor time over existing software. The software is capable of porting to a wide platform range, supporting a large number of e-beam writers.
The VIP postprocessor will be developed in line with the E-beam writers under development in the project FREE (5030). A key aim of VIP is the application of its results in silicon foundries.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences computer and information sciences software
- social sciences economics and business economics production economics productivity
- natural sciences physical sciences optics
- natural sciences physical sciences electromagnetism and electronics semiconductivity
- natural sciences chemical sciences inorganic chemistry metalloids
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
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Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
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Coordinator
85521 Ottobrunn
Germany
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.