Objective
The work covered by the DRYDEL project aimed to develop a deep-UV sensitive photoresist and the associated processing, with the objective of extending the DESIRE (Diffusion-Enhanced Silylating Resist) process down to the 0.3 micron range. The DESIRE process is a single-layer resist system based on surface imaging resulting from selective silylation and anisotropic dry development.
The work covered by the dry develop optical lithography (DRYDEL) project aimed to develop a deep ultraviolet (UV) sensitive photoresist and the associated processing, with the objective of extending the diffusion enhanced silylating resist (DESIRE) process down to the 0.3 micron range. The DESIRE process is a single layer resist system based on surface imaging resulting from selective silylation and and anisotropic dry development. The work was distributed over 4 work packages. In the first, the resist materials were developed. Variations of the various components of the resist (photoactive compound, resin composition and solvents) have been investigated. This has led to an optimization of the i-line version of the resist (for exposure at 365 nm) and to the fabrication of first samples of the deep UV version (for exposure at 248 nm).
In the second work package resist processing, such as silylation, dry development and pattern transfer, has been studied. Besides an optimization of each processing step, some more fundamental studies were carried out on silylation kinetics and swelling behaviour. Several new pieces of equipment were evaluated for silylation and dry development (including magnetically enhanced reactors and electron cyclotron resonance (ECR). Using the optimized resist materials and processes, lithographic resolution down to 0.25 micron (lines/spaces) has been demonstrated with perfect line width control over highly reflective topography (on deep-UV stepper, lambda = 248 nm, numerical operture (NA) = 0.42). The process was demonstrated in the third work package. A final work package showed the feasibility of the DESIRE process for application in gallium arsenide processing. The lift off capabilities of the process were demonstrated by the fabrication of appropriate test circuits.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences physical sciences theoretical physics particle physics particle accelerator
- natural sciences physical sciences astronomy planetary sciences planetary geology
- natural sciences chemical sciences inorganic chemistry post-transition metals
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
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Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
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Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
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Coordinator
3030 Heverlee
Belgium
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.