Objective
This proposal will address high volume production of MEMS (Micro-Electro Mechanical Systems) with a piezoelectric thin film as active element (piezoMEMS). This technology can fulfil many of the requirements of sensors and actuators in tomorrow’s smart systems, as a result of the large displacements, high sensing functionality and high energy densities that can be obtained, compared to pure Si-MEMS. As a consequence, they are very attractive for industries like automotive, aerospace, medical, telecom and consumer electronics. Large European companies tend to buy devices like sensors for their products, rather than to develop processes and devices themselves. European SMEs are natural providers of such devices. However, since there are no automated facilities in Europe for volume production of piezoelectric microsystems, they are not able to commercialize piezoMEMS products. A combined effort by European research institutes, industry and SMEs can close this gap. The main vision of piezoVolume is to provide the means for high throughput, cost-effective and robust manufacturing of piezoelectric microsystems in Europe, where SMEs are both device developers and production technology providers. A set of procedures, guidelines and fabrication tools will be developed, enabling short time to market for new device concepts. piezoVolume will combine three leading research groups in Europe, which are already acting worldwide in the piezoMEMS scientific community, with highly relevant and skilled technological partners, to build a consortium that is able to develop a full production line for piezoMEMS in Europe for the first time. Readily available cost-effective wafer based batch processing of piezoMEMS will lower the threshold for industry acceptance and be the enabling technology to realise new products based on piezoMEMS.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: https://op.europa.eu/en/web/eu-vocabularies/euroscivoc.
- engineering and technology materials engineering coating and films
- engineering and technology electrical engineering, electronic engineering, information engineering electronic engineering sensors
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
FP7-NMP-2008-SME-2
See other projects for this call
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
CP-TP - Collaborative Project targeted to a special group (such as SMEs)
Coordinator
7034 Trondheim
Norway
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.