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High volume piezoelectric thin film production process for microsystems

Objective

This proposal will address high volume production of MEMS (Micro-Electro Mechanical Systems) with a piezoelectric thin film as active element (piezoMEMS). This technology can fulfil many of the requirements of sensors and actuators in tomorrow’s smart systems, as a result of the large displacements, high sensing functionality and high energy densities that can be obtained, compared to pure Si-MEMS. As a consequence, they are very attractive for industries like automotive, aerospace, medical, telecom and consumer electronics. Large European companies tend to buy devices like sensors for their products, rather than to develop processes and devices themselves. European SMEs are natural providers of such devices. However, since there are no automated facilities in Europe for volume production of piezoelectric microsystems, they are not able to commercialize piezoMEMS products. A combined effort by European research institutes, industry and SMEs can close this gap. The main vision of piezoVolume is to provide the means for high throughput, cost-effective and robust manufacturing of piezoelectric microsystems in Europe, where SMEs are both device developers and production technology providers. A set of procedures, guidelines and fabrication tools will be developed, enabling short time to market for new device concepts. piezoVolume will combine three leading research groups in Europe, which are already acting worldwide in the piezoMEMS scientific community, with highly relevant and skilled technological partners, to build a consortium that is able to develop a full production line for piezoMEMS in Europe for the first time. Readily available cost-effective wafer based batch processing of piezoMEMS will lower the threshold for industry acceptance and be the enabling technology to realise new products based on piezoMEMS.

Field of science

  • /engineering and technology/materials engineering/coating and films
  • /social sciences/economics and business/economics/production economics
  • /engineering and technology/electrical engineering, electronic engineering, information engineering/electronic engineering/sensors

Call for proposal

FP7-NMP-2008-SME-2
See other projects for this call

Funding Scheme

CP-TP - Collaborative Project targeted to a special group (such as SMEs)

Coordinator

STIFTELSEN SINTEF
Address
Strindveien 4
7034 Trondheim
Norway
Activity type
Research Organisations
EU contribution
€ 1 007 264
Administrative Contact
Frode Tyholdt (Dr.)

Participants (9)

ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE
Switzerland
EU contribution
€ 333 063,60
Address
Batiment Ce 3316 Station 1
1015 Lausanne
Activity type
Higher or Secondary Education Establishments
Administrative Contact
Paul Muralt (Prof.)
AIXACCT SYSTEMS GMBH
Germany
EU contribution
€ 426 565,20
Address
Talbotsr 25
52068 Aachen
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Klaus Prume (Dr.)
SONITOR TECHNOLOGIES AS
Norway
EU contribution
€ 236 876,40
Address
Forskningsveien 1B
0314 Oslo
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Wilfred Booij (Dr.)
OC OERLIKON BALZERS AG
Liechtenstein
EU contribution
€ 290 952,50
Address
Iramali 18
9496 Balzers
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Bernd Heinz (Dr.)
CANON PRODUCTION PRINTING NETHERLANDS BV
Netherlands
EU contribution
€ 85 179,80
Address
Sint Urbanusweg 43
5914 CA Venlo
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Rinus Groeneveld (Mr.)
VERMON SA
France
EU contribution
€ 183 615,75
Address
Rue General Renault 180
37000 Tours
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Jean-Yves Corduan (Mr.)
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Germany
EU contribution
€ 305 141,25
Address
Hansastrasse 27C
80686 Munchen
Activity type
Research Organisations
Administrative Contact
Andrea Zeumann (Ms.)
COVENTOR SARL
France
EU contribution
€ 339 466,50
Address
Avenue Du Quebec 3
91140 Villebon Sur Yvette
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Gerold Schröpfer (Dr.)
solar-semi GmbH
Germany
EU contribution
€ 541 875
Address
Manfred Von Ardenne Ring 20
01099 Dresden
Activity type
Private for-profit entities (excluding Higher or Secondary Education Establishments)
Administrative Contact
Beuermann Elke (Ms.)