Objectif This proposal will address high volume production of MEMS (Micro-Electro Mechanical Systems) with a piezoelectric thin film as active element (piezoMEMS). This technology can fulfil many of the requirements of sensors and actuators in tomorrow’s smart systems, as a result of the large displacements, high sensing functionality and high energy densities that can be obtained, compared to pure Si-MEMS. As a consequence, they are very attractive for industries like automotive, aerospace, medical, telecom and consumer electronics. Large European companies tend to buy devices like sensors for their products, rather than to develop processes and devices themselves. European SMEs are natural providers of such devices. However, since there are no automated facilities in Europe for volume production of piezoelectric microsystems, they are not able to commercialize piezoMEMS products. A combined effort by European research institutes, industry and SMEs can close this gap. The main vision of piezoVolume is to provide the means for high throughput, cost-effective and robust manufacturing of piezoelectric microsystems in Europe, where SMEs are both device developers and production technology providers. A set of procedures, guidelines and fabrication tools will be developed, enabling short time to market for new device concepts. piezoVolume will combine three leading research groups in Europe, which are already acting worldwide in the piezoMEMS scientific community, with highly relevant and skilled technological partners, to build a consortium that is able to develop a full production line for piezoMEMS in Europe for the first time. Readily available cost-effective wafer based batch processing of piezoMEMS will lower the threshold for industry acceptance and be the enabling technology to realise new products based on piezoMEMS. Champ scientifique engineering and technologymaterials engineeringcoating and filmsengineering and technologyelectrical engineering, electronic engineering, information engineeringelectronic engineeringsensorsengineering and technologyelectrical engineering, electronic engineering, information engineeringelectrical engineeringpiezoelectrics Programme(s) FP7-NMP - Specific Programme "Cooperation": Nanosciences, Nanotechnologies, Materials and new Production Technologies Thème(s) NMP-2008-3.5-1 - Volume production process chains for high throughput micro-manufacturing Appel à propositions FP7-NMP-2008-SME-2 Voir d’autres projets de cet appel Régime de financement CP-TP - Collaborative Project targeted to a special group (such as SMEs) Coordinateur STIFTELSEN SINTEF Contribution de l’UE € 1 007 264,00 Adresse STRINDVEIEN 4 7034 Trondheim Norvège Voir sur la carte Région Norge Trøndelag Trøndelag Type d’activité Research Organisations Contact administratif Frode Tyholdt (Dr.) Liens Contacter l’organisation Opens in new window Site web Opens in new window Coût total Aucune donnée Participants (9) Trier par ordre alphabétique Trier par contribution de l’UE Tout développer Tout réduire ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE Suisse Contribution de l’UE € 333 063,60 Adresse BATIMENT CE 3316 STATION 1 1015 Lausanne Voir sur la carte Région Schweiz/Suisse/Svizzera Région lémanique Vaud Type d’activité Higher or Secondary Education Establishments Contact administratif Paul Muralt (Prof.) Liens Contacter l’organisation Opens in new window Site web Opens in new window Coût total Aucune donnée AIXACCT SYSTEMS GMBH Allemagne Contribution de l’UE € 426 565,20 Adresse TALBOTSR 25 52068 Aachen Voir sur la carte Région Nordrhein-Westfalen Köln Städteregion Aachen Type d’activité Private for-profit entities (excluding Higher or Secondary Education Establishments) Contact administratif Klaus Prume (Dr.) Liens Contacter l’organisation Opens in new window Site web Opens in new window Coût total Aucune donnée SONITOR TECHNOLOGIES AS Norvège Contribution de l’UE € 236 876,40 Adresse DRAMMENSVEIEN 288 0283 Oslo Voir sur la carte Région Norge Oslo og Viken Oslo Type d’activité Private for-profit entities (excluding Higher or Secondary Education Establishments) Contact administratif Wilfred Booij (Dr.) Liens Contacter l’organisation Opens in new window Site web Opens in new window Coût total Aucune donnée OC OERLIKON BALZERS AG Liechtenstein Contribution de l’UE € 290 952,50 Adresse IRAMALI 18 9496 BALZERS Voir sur la carte Type d’activité Private for-profit entities (excluding Higher or Secondary Education Establishments) Contact administratif Bernd Heinz (Dr.) Liens Contacter l’organisation Opens in new window Coût total Aucune donnée CANON PRODUCTION PRINTING NETHERLANDS BV Pays-Bas Contribution de l’UE € 85 179,80 Adresse SINT URBANUSWEG 43 5914 CA Venlo Voir sur la carte Région Zuid-Nederland Limburg (NL) Noord-Limburg Type d’activité Private for-profit entities (excluding Higher or Secondary Education Establishments) Contact administratif Rinus Groeneveld (Mr.) Liens Contacter l’organisation Opens in new window Coût total Aucune donnée VERMON SA France Contribution de l’UE € 183 615,75 Adresse 67 RUE FROMENTEL 37000 Tours Voir sur la carte Région Centre — Val de Loire Centre — Val de Loire Indre-et-Loire Type d’activité Private for-profit entities (excluding Higher or Secondary Education Establishments) Contact administratif Jean-Yves Corduan (Mr.) Liens Contacter l’organisation Opens in new window Site web Opens in new window Coût total Aucune donnée FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV Allemagne Contribution de l’UE € 305 141,25 Adresse HANSASTRASSE 27C 80686 Munchen Voir sur la carte Région Bayern Oberbayern München, Kreisfreie Stadt Type d’activité Research Organisations Contact administratif Andrea Zeumann (Ms.) Liens Contacter l’organisation Opens in new window Site web Opens in new window Coût total Aucune donnée COVENTOR SARL France Contribution de l’UE € 339 466,50 Adresse AVENUE DU QUEBEC 3 91140 Villebon Sur Yvette Voir sur la carte Région Ile-de-France Ile-de-France Essonne Type d’activité Private for-profit entities (excluding Higher or Secondary Education Establishments) Contact administratif Gerold Schröpfer (Dr.) Liens Contacter l’organisation Opens in new window Site web Opens in new window Coût total Aucune donnée solar-semi GmbH Allemagne Contribution de l’UE € 541 875,00 Adresse MANFRED VON ARDENNE RING 20 01099 Dresden Voir sur la carte Type d’activité Private for-profit entities (excluding Higher or Secondary Education Establishments) Contact administratif Beuermann Elke (Ms.) Liens Contacter l’organisation Opens in new window Site web Opens in new window Coût total Aucune donnée