Objective
The growing pressure on manufacturers to obtain high yields from their wafer fabrication operations is leading a trend towards single wafer processing. Rapid Thermal Processing (RTP) has come to be viewed as the single wafer alternative to furnace tube processing. The project aimed to develop a multichamber RTP machine with improved control of the on-wafer temperature and including novel microwave-enhanced techniques for precleaning before oxidation or deposition processes.
The growing pressure on manufacturers to obtain high yields from their wafer fabrication operations is leading a trend towards single wafer processing. Rapid thermal processing (RTP) has come to be viewed as the single wafer alternative to furnace tube processing. The project aims at developing a multichamber RTP machine with improved control of the onwafer temperature and including novel microwave enhanced techniques for precleaning before oxidation or deposition processes.
The principal technical tasks of this project involved: the identification of the requirement put on RTP for very large scale integration (VLSI) application specific integrated circuit (ASIC), development of the RTP techniques and processes including precleaning, dielectric and polysilicon deposition and the evaluation of the new multichamber RTP machine in an industrial environment.
Several results have been demonstrated concerning: process simulation, process characterization and optimization on existing experimental reactor, temperature measurement and emissivity control and specification of the industrial automatic multichamber machine. Such equipment was expected to give high yields in high temperature processes. Because of its greater flexibility, it is expected to be an important production tool for low volume and fast turnaround ASIC.
The principal technical tasks of this project involved:
- the identification of the requirement put on RTP for VLSI ASIC
- development of the RTP techniques and processes including precleaning, dielectric and polysilicon deposition
- evaluation of the new multichamber RTP machine in an industrial environment.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
You need to log in or register to use this function
We are sorry... an unexpected error occurred during execution.
You need to be authenticated. Your session might have expired.
Thank you for your feedback. You will soon receive an email to confirm the submission. If you have selected to be notified about the reporting status, you will also be contacted when the reporting status will change.
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Data not available
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Data not available
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Data not available
Coordinator
38330 MONTBONNOT
France
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.