Objective
In this project the development of a method is proposed which characterises the electric operation of a fully operational device by determining the potential distribution inside the structure. The latter not only gives a direct correlation with the predictions from a device simulator but, as the potential distributions are closely linked to the dopant distributions, determination of the potential distributions will also lead to the identification of dopant distributions. The result of this work will be a method which greatly facilitates process and device development and sustains failure analysis for the next generations of Si-technology.
Submicron device development and fabrication hinges on the tight control of dopant incorporation and (re)distribution during the whole fabrication process. Facing the increasing costs for processing, extensive usage of process and device simulation programs (TCAD) has become a standard in technology development. However since advanced processes contain numerous less well characterised processing steps (like short time anneals, transient diffusion, stress induced diffusion, 2D-diffusion...) models are not yet completely predictive. Calibration of TCAD-tools and further model development are therefore essential activities for all semiconductor companies involved in deep submicron technology. An important restriction in the successful application of this strategy is the availability of suitable characterisation methods. With decreasing device dimensions the requirements posed on the analysis tools have increased from moderate requirements on 1D-depth resolution and sensitivity applied to simple test structures to very stringent requests related to 2D-resolution (nm!), quantification accuracy (2-5 %) and the capability to probe directly on devices. Concurrent with the TCAD-needs are the demands from failure analysis for high spatial resolution analysis of devices.
Scanning probe technology already has gained wide access in the semiconductor fabrication particularly for surface roughness (with sub-nm sensitivity) and dimensional metrology. The extension from a pure topographical measurement towards a more functional analysis (carrier or potential profiling) by the (additional) acquisition of a relevant electrical signal might lead to a method satisfying the TCAD- and failure analysis needs in terms of the required 2D-resolution, electrical information and applicability to devices.
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences physical sciences electromagnetism and electronics semiconductivity
- natural sciences mathematics pure mathematics mathematical analysis functional analysis
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Keywords
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Project’s keywords as indicated by the project coordinator. Not to be confused with the EuroSciVoc taxonomy (Fields of science)
Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
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Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
3001 Leuven
Belgium
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.