Objective
"A less-well known aspect of Moore's law is the need for increased drive current of the transistors. In addition to traditional dimensional scaling, recent work to improve the drive current is increasingly based on alternative materials with higher carrier mobility. When replacing silicon with III-V compound semiconductors as the channel material in CMOS devices, the main problem is the passivation of the interface between the channel and the gate dielectric due to defects created at the III-V surface by the formation of native oxides. It is important to either remove these defects or avoid their formation before the deposition of the gate dielectric to achieve acceptable electronic performance. The most promising gate dielectric for III-V materials is Al2O3 when grown by atomic layer deposition (ALD). Although ALD Al2O3 provides native-oxide-free interfaces with GaAs, the interface defect density is still much larger than on silicon and it is necessary to avoid the oxidation of the surface prior to gate dielectric deposition. Since GaAs has been reported as being deposited epitaxially by ALD, this will be a means to generate defect free surfaces. But to be effective, this must be combined with a clustered deposition of Al2O3 without any air break. The use of in-situ analysis tools in combination with a clustered deposition tool provide an ideal means to study the initial stages of ALD on III-V surfaces and the interface formation since all air exposure will be avoided. In-situ analysis during ALD has been done before, but never with a combination of analysis tools used on the same sample. Since no prior tools combining clustered ALD of both GaAs and Al2O3 and in-situ characterization techniques exist, a major part of the proposed work will be the design and the assembly of a clustered ALD deposition tool. By enabling such a combination, this project will provide the clearest insight into the growth mechanisms of ALD and of III-V interfaces to date."
Fields of science (EuroSciVoc)
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
CORDIS classifies projects with EuroSciVoc, a multilingual taxonomy of fields of science, through a semi-automatic process based on NLP techniques. See: The European Science Vocabulary.
- natural sciences chemical sciences electrochemistry electrolysis
- natural sciences physical sciences electromagnetism and electronics semiconductivity
- natural sciences chemical sciences inorganic chemistry metalloids
- social sciences law
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Programme(s)
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Multi-annual funding programmes that define the EU’s priorities for research and innovation.
Topic(s)
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Calls for proposals are divided into topics. A topic defines a specific subject or area for which applicants can submit proposals. The description of a topic comprises its specific scope and the expected impact of the funded project.
Call for proposal
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
Procedure for inviting applicants to submit project proposals, with the aim of receiving EU funding.
FP7-PEOPLE-2010-RG
See other projects for this call
Funding Scheme
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Funding scheme (or “Type of Action”) inside a programme with common features. It specifies: the scope of what is funded; the reimbursement rate; specific evaluation criteria to qualify for funding; and the use of simplified forms of costs like lump sums.
Coordinator
3001 Leuven
Belgium
The total costs incurred by this organisation to participate in the project, including direct and indirect costs. This amount is a subset of the overall project budget.