Thin film deposition and structuring is a key field in devices miniaturization. The drive to new functionalities in integrated devices makes of complex oxide materials with their plethora of properties a must for extending the application range of miniaturized devices. This project addresses this important area and contributes as well to a higher degree of sustainability. We are entering a new economical era where flexibility and adaptability have to stand along with cost-optimisation and may even become t he leading parameter. We are proposing a new vision in thin film deposition that will associate effectively cost optimisation, flexibility and sustainability based on Laser-Assisted Chemical Beam Epitaxy (LACBE) process.
This technique is the key to provide the future devices requirements that the more standard methods will never challenge. This proposed method will allow growing multi-component oxides with 3D patterning of properties during the growth in only one step (3D selective and graded properties at the micrometer and nanometre scale). The first main output of the project will be the investigation of a new thin film deposition technique to achieve direct 3D patterning of the film properties in only one step during the growth (selective growth, selective doping, graded indexes).
The second main output will be to fully characterise by combinatorial deposition a whole material family (LiNO3 pure and doped, and new close similar materials like SrxBa1-xNb2O6 (SBN) and [Na,K)(Nb,Ta)O3]1-x[LiNbO3]x (x #l t; 0.1)) with the ability to fine tune the properties for future applications. The final main output will be to investigate the integration of many functions on one single device with material properties patterning during the growth, allowing vertical integration.
- FP6-NMP - Nanotechnologies and nanosciences, knowledge-based multifunctional materials and new production processes and devices: thematic priority 3 under the 'Focusing and integrating community research' of the 'Integrating and strengthening the European Research Area' specific programme 2002-2006.
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FinanzierungsplanSTREP - Specific Targeted Research Project