Atom Probe Tomography (APT) Metrology for future 3D semiconductor devices

Project Information

APT-Met

Grant agreement ID: 660598

DOI 10.3030/660598

Project closed

EC signature date 26 March 2015

Start date 1 August 2015

End date 31 July 2017

Funded under

• EXCELLENT SCIENCE - Marie Skłodowska-Curie Actions

Total cost € 160 800,00

EU contribution € 160 800,00

Coordinated by

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium