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Mems-based zerO-power Reconfigurable PHotonic ICs

Periodic Reporting for period 3 - MORPHIC (Mems-based zerO-power Reconfigurable PHotonic ICs)

Berichtszeitraum: 2020-07-01 bis 2022-06-30

2. Silicon Photonic MEMS phase shifter with a thin beam that can be moved by a comb drive
Hermetically sealed MEMS cavities on the silicon photonics wafer applied to a full 100 mm
Multi-layer ceramic interposer for large-scale photonic circuits
Programmable waveguide mesh circuit with silicon photonic MEMS tunable couplers and phase shifter
6. Software framework for programmable photonics, combining design, simulation & hardware control
Silicon Photonic MEMS with frees-standing waveguides and movable device
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