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Manufacturing process for ultimate performance inertial MEMS Gyroscope (MUPIA)

Project description

Optimising manufacturing processes for high-performance aeronautical gyroscopes

Clean Sky 2 is a European research programme aimed at developing leading edge clean air transport technologies that will reduce greenhouse gas emissions and noise levels produced by aircraft. One component of the programme includes enhancing the manufacturing processes of inertial gyroscopes. As such, the EU-funded MUPIA project aims to establish cost effective fabrication processes for an inertial micro-electromechanical systems (MEMS) gyroscope. It will systematically improve each step of the fabrication process to meet the required specifications. The technological improvements will result in a lighter and more reliable inertial MEMS gyroscope. This will contribute to air transport safety and reduced fuel consumption.

Objective

The main objective of the MUPIA project is to demonstrate a cost-efficient manufacturing process for a high end MEMS gyroscope for aerospace Applications. Both the sensor element and the packaging process is critical to achieve a precise, long term stable and reliable component. The consortium consist of SINTEF and Cerinnov, which together with sub Suppliers cover both the necessary silicon MEMS processing and the high end ceramic packaging technology needed to reach the goal of the project. SINTEF has worked with industrialisation of MEMS components since the 1960s. Despite being a research industry, SINTEF holds the certifications ISO 9001:2015, ISO 14001:2015 and OHSAS 18001:2007 and have a regular production of MEMS components for the petroleum, medical and aerospace industry. Cerinnov has expertise in laser processes for ablation and sintering. They will collaborate with a sub Suppliers with the development of the package for the gyroscope.

Coordinator

SINTEF AS
Net EU contribution
€ 1 015 000,00
Address
STRINDVEGEN 4
7034 Trondheim
Norway

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Region
Norge Trøndelag Trøndelag
Activity type
Research Organisations
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Total cost
€ 1 015 000,00

Participants (2)