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CORDIS

Boosting Performance of Phase Change Devices by Hetero- and Nano-Structure Material Design

Risultati finali

Dissemination and communication 2

A report about all activities related to dissemination and communication will be prepared at M36 To report incrementally on all activities from month 18 to 42This deliverable relates to WP1 and T13

Electronic characterization and modelling of multilayers

Electronic characterization based on photoemission XPS and UPS will be reported Such characterization takes advantage of the opportunity to be performed in situ for samples grown by PVD at URTOV The evolution of the electronic properties will be studied as a function of temperature for both crystalline and amorphous single layers and will be compared to samples grown by PLD at UGRO and MBE at PDI Electronic properties of multilayers will also be directly derived from the abinitio atomistic simulations performed by UMBThis deliverable relates to WP4 and specifically to task 42

Test vehicle optimization

Final optimized version of the structure of the test vehicle will be described in all details It will be a focus on the similarities and differences from formerly developed devicesThis deliverable relates to WP3 and task 31

Dissemination and communication 1

A report about all activities related to dissemination and communication will be prepared at M18. To keep track of for instance the traffic on the project website, the publications, the presentation at conferences, participants at the summer school organized by Beforehand. This deliverable relates to WP1 and T1.3.

Controlled deposition of multilayered heterostructures

It will be reported on the control achieved for the synthesis of planar thin films in form of multilayer heterostructures crystalline and amorphous Insitu monitoring as well as all characterization methods used to obtain and improve the growth control of the interfaces in such multilayers will be describedThis deliverable relates to WP2 and in specifically task 21

Device specifications release

Device specifications will be formulated to allow the device realization. the specification will comprise geometrical constraints, layer thickness, materials for contacts and isolating parts and maximal roughness of the bottom electrodes. This deliverable relates to WP3 it will be accomplished in task 3.1 and will be linked to MS1.

Atomic structure characterization and modelling of optimized multilayers

The characterization of the actual optimized structures in form of thin films and in the devices will be reviewed In particular links to device performance and thus to WP3 will be discussed The project is very well equipped to perform structural analysis of devices eg by using stateoftheart FIBSEM for crosssection TEM sample preparation from localized regions in devices and the employment of such capability will be reported hereThis deliverable relates to WP4 and specifically to task 41

Vibrational properties and Raman spectra of multilayers

It will be reported on the Raman characterization to assess the phase of the investigated material By studying the intensity ratio of antiStokes and Stokes scattering an estimate of the heat transfer to the sample during illumination will be given Phonons and Raman spectra of heterostructures will be computed within density functional perturbation theory at UMB In the end the comparison between experiments and modelling will be givenThis deliverable relates to WP4 and specifically to task 43

Growth optimization of thin films

Within the project, for the realization of thin multilayer films, we plan to use three deposition techniques, all compatible with current device architectures. The key point here is to ensure the best structural material quality, in order to reduce the spurious effect on the physical properties given by, for instance, imperfections, such as grain boundaries. This approach enables the production of the best structures and it will be advantageous for revealing self-adjusting mechanisms as those depending on spinodal decomposition or intermixing at interfaces. The fabrication effort of many heterostructures development of four groups will be summarized. This deliverable relates to WP2 and specifically to task 2.1.

Characterization of optimized core-shell NWs

The nanostructures and in particular the optimized coreshell NW combinations will be characterized by several means Especially in terms of atomistic structure as well as electrical and thermal properties This effort and the obtained results will be reportedThis deliverable relates to WP4 and specifically to task 41 44 45

Atomic structure characterization and modelling of optimized thin films

Structural and compositional characterization down to the atomic level will be reported. This characterization will involve state-of-the-art (S)TEM analysis performed by UGRO and CNR-IMM (Catania), where both partners can provide for instance sub-Angstrom resolution Z-contrast images of cross-sections of as-deposited and annealed multilayers and of core-shell NWs. In addition the interplay of spectroscopic techniques like EELS and EDX with STEM imaging will be discussed. It will be reported on ab-initio MD simulations to study (1) the relative stabilities of amorphous and crystalline phases at the interfaces and (2) the phase change mechanism within the heterostructures. Further information obtained by photoemission spectroscopy (at URTOV) on stoichiometry, chemical bonding, oxidation state of metals, interdiffusion (XPS) and formation of Urbach tails (UPS) will be reported. This deliverable relates to WP4 and specifically to task 4.1.

Intermediate exploitation report

The exploitation of results obtained will be reported and in case necessary the partners will identify risks and potential obstacles to the future exploitation of the projects results within and outside the consortiumWithin this report a market analysis will be provided Depending on the needs it might include some of the following instruments Target market size needs trends and segments 5Cs Analysis Customers Company SWOT Competitors Collaborators Technical Commercial Logistical and Context PESTLE Analysis competitive strategy Porters Five Forces end user requirements and benefitsFinancial Projections PL accountsforecasts Cash flow projections might also be included if discussed during the consortium meetingsIn addition it will be reported on how the intellectual property from the BeforeHAND project is being managed ownership patent costs access licensing etc Future RI developmentsA strategy for funding needs postproject will be presented with description of potential sources of funds and investment required to reach Production of Beforehand devicesThis deliverable relates to WP1 and T14

Electrical and structural evaluation of the failure mechanisms

Within this report specific electrical andor optical tests will be summarized and the failure mechanisms will be correlated to the structure and to the atomic element distribution by employing subAngstrom resolution and analytical techniques EELS and EDX This activity report will be performed on the more promising materials and devicesThis deliverable relates to WP4 and specifically to task 45

Test vehicle available

The realization of a test vehicle able to be exchanged with the partners involved in the material development URTOV UGRO CNRIMM and PDI for material deposition will be described The vehicle will have several designs to flexibly adapt to the necessity of the partners The vehicles will bear all necessary requirements to be tested electricallyThis deliverable relates to WP3 and specifically to task 31

Performance and reliability figure of merit definition

The technology key issues involved in the electrical properties including the failure mechanisms will be identified The desired switching properties of the new heterostructures determining the SETRESET operation window will be defined The reliability aspects such as thermal stability cyclability and resistance drift will be also consideredThis deliverable relates to WP3 and in specifically task 34

Study of material crystallization

In this report the crystallization of several amorphous films grown by the different available deposition techniques will be discussed Different thermal annealing strategies will be described The crystallization speed and thermal stability will be evaluated by considering the variation of the film electrical resistivity as function of time at fixed annealing temperatures andor by following the reflectivity changes as a function of time The activation energy will be determined and discussed in respect to the thermal stability of the amorphous multilayers This deliverable relates to WP2 and in specifically task 22

Controlled synthesis of core-shell NWs

It will be reported on the MOCVD synthesis of coreshell NWs formed by proper combinations of the InGeSbTe system in AB or BA sequence such as GeSbTeSb2Te3 or InSbTeGeTe via VLS mechanism for the core NWs and by conformal overgrowth amorphous or epitaxial depending on the deposition temperature for the shell NWs This deliverable relates to WP2 and in specifically task 23

Special journal issue addressing PCM heterostructures

The beneficiaries have agreed to edit a special journal issue addressing PCM heterostructures with contributions from different partnersThis deliverable relates to WP1 and T13

Summer School

Summer School will be jointly organized by UMB and PDI during month M 33 The school will target Masters and PhD students and young PostDocs working in the fields of PCM as well as related materials and technologies It will include tutorial lectures about specific topics from experts as well as shorttalks and poster sessions for presentation of students resultsThis deliverable relates to WP1 and T13

Growth of single core NWs and study of conformal overgrowth

The activity based on the synthesis and characterization of single NWs, obtained by MOCVD will be reported. In particular the progress in synthesis of different possible materials GeTe, Ge-Sb-Te, Sb2Te3, In-Sb-Te and In-Ge-Te alloys will be presented. This deliverable relates to WP2 and in specifically task 2.3.

Electrical and thermal characterization and modelling

Thermal characterization of PCM thin film stacks NWs and nanodevices will be described The obtained results will be shown and compared to the calculated thermal properties A simulation scheme of the heat transfer within the device configuration developed will be used to allow the simulation of both states of the phase change materialsThis deliverable relates to WP4 and specifically to task 44

Scientific symposium

A final 1day BeforeHand Scientific Symposium will be held at the end of the EPCOS workshop to be jointly organized by UGRO and CNRIMM during M33 The symposium will bring together major experts in the field to discuss their most recent results In this final meeting a special session will be planned for a critical analysis of BeforeHand activities highlighting the successes and naming points to be improved In addition the BeforeHand members together with academic and nonacademic guests will discuss the future perspectives in the field and elaborate future strategiesThis deliverable relates to WP1 and T13

Pubblicazioni

A first-principles study of the switching mechanism in GeTe/InSbTe superlattices

Autori: Chiara Ribaldone, Daniele Dragoni, Marco Bernasconi
Pubblicato in: Nanoscale Advances, Numero 2/11, 2020, Pagina/e 5209-5218, ISSN 2516-0230
Editore: Royal society of Chemistry
DOI: 10.1039/d0na00577k

Phase Separation in Ge-Rich GeSbTe at Different Length Scales: Melt-Quenched Bulk versus Annealed Thin Films

Autori: 1. Daniel T. Yimam , A.J.T. Van Der Ree, Omar Abou El Kheir, Jamo Momand, Majid Ahmadi, George Palasanzas , Marco Bernasconi, Bart J. Kooi
Pubblicato in: Nanomaterials, Numero 12, 2022, Pagina/e 1717, ISSN 2079-4991
Editore: MDPI
DOI: 10.3390/nano12101717

Mechanism of amorphous phase stabilization in ultrathin films of monoatomic phase change material.

Autori: Daniele Dragoni; Jörg Behler; Marco Bernasconi
Pubblicato in: Nanoscale, 13 (38), pp. 16146-16155, Numero 5, 2021, ISSN 2040-3372
Editore: Royal Society of Chemistry
DOI: 10.1039/d1nr03432d

Crystallization properties of melt-quenched Ge-rich GeSbTe thin films for phase change memory applications

Autori: S. M. S. Privitera, I. López García, C. Bongiorno, V. Sousa, M. C. Cyrille, G. Navarro, C. Sabbione, E. Carria, E. Rimini
Pubblicato in: Journal of Applied Physics, Numero 128/15, 2020, Pagina/e 155105, ISSN 0021-8979
Editore: American Institute of Physics
DOI: 10.1063/5.0023696

Effect of characteristic size on the collective phonon transport in crystalline GeTe

Autori: Kanka Ghosh; Andrzej Kusiak; Jean-Luc Battaglia
Pubblicato in: "Physical Review Materials, , 2021, 5 (7), ⟨10.1103/physrevmaterials.5.073605⟩", Numero 2, 2021, ISSN 2475-9953
Editore: American Physical Society
DOI: 10.1103/physrevmaterials.5.073605

Crystallization and Electrical Properties of Ge-Rich GeSbTe Alloys

Autori: Stefano Cecchi; Iñaki Lopez Garcia; Antonio M. Mio; Eugenio Zallo; Omar Abou El Kheir; Raffaella Calarco; Marco Bernasconi; Giuseppe Nicotra; Stefania M. S. Privitera
Pubblicato in: Nanomaterials; Volume 12; Numero 4; Pages: 631, Numero 9, 2022, ISSN 2079-4991
Editore: MDPI
DOI: 10.3390/nano12040631

Improvement of Phase‐Change Memory Performance by Means of GeTe/Sb 2 Te 3 Superlattices

Autori: Damien Térébénec, Niccolo Castellani, Nicolas Bernier, Vitomir Sever, Philippe Kowalczyk, Mathieu Bernard, Marie-Claire Cyrille, Nguyet-Phuong Tran, Françoise Hippert, Pierre Noé
Pubblicato in: physica status solidi (RRL) – Rapid Research Letters, Numero 15/3, 2021, Pagina/e 2000538, ISSN 1862-6254
Editore: Wiley - VCH Verlag GmbH & CO. KGaA
DOI: 10.1002/pssr.202000538

High-throughput calculations on the decomposition reactions of off-stoichiometry gesbte alloys for embedded memories

Autori: Omar Abou El Kheir; Marco Bernasconi
Pubblicato in: Nanomaterials, 11 (9), art. no. 2382, Numero 2, 2021, ISSN 2079-4991
Editore: MDPI
DOI: 10.3390/nano11092382

Phase-Change and Ovonic Materials (Second Edition)

Autori: Noé, P., Kooi, B.J., Wuttig, M.
Pubblicato in: Physica Status Solidi - Rapid Research Letters, 15 (3), art. no. 2100078, 2021, ISSN 1862-6270
Editore: Wiley
DOI: 10.1002/pssr.202100078

Crystallization of nano amorphized regions in thin epitaxial layer of Ge 2 Sb 2 Te 5

Autori: G D’Arrigo, A M Mio, J E Boschker, A Meli, S Cecchi, E Zallo, A Sciuto, M Buscema, E Bruno, R Calarco, E Rimini
Pubblicato in: Journal of Physics D: Applied Physics, Numero 53/19, 2020, Pagina/e 194001, ISSN 0022-3727
Editore: Institute of Physics Publishing
DOI: 10.1088/1361-6463/ab71ae

Phase-change memories: materials science, technological applications and perspectives

Autori: Massimo Longo, Paolo Fantini, Pierre Noé
Pubblicato in: Journal of Physics D: Applied Physics, Numero 53/44, 2020, Pagina/e 440201, ISSN 0022-3727
Editore: Institute of Physics Publishing
DOI: 10.1088/1361-6463/aba0e0

Interface Analysis of MOCVD Grown GeTe/Sb2 Te3 and Ge-Rich Ge-Sb-Te/Sb2 Te3 Core-Shell Nanowires

Autori: Kumar, A., Mirshokraee, S.A., Lamperti, A., Cantoni, M., Longo, M., Wiemer, C.
Pubblicato in: Nanomaterials, 12 (10), art. no. 1623, 2022, ISSN 2079-4991
Editore: MDPI
DOI: 10.3390/nano12101623

Innovative Nanocomposites for Low Power Phase-Change Memory: GeTe/C Multilayers

Autori: Térébénec, D., Bernier, N., Castellani, N., Bernard, M., Jager, J.-B., Tomelleri, M., Paterson, J., Cyrille, M.-C., Tran, N.-P., Giordano, V.M., Hippert, F., Noé, P.
Pubblicato in: Physica Status Solidi - Rapid Research Letters, 2022, ISSN 1862-6270
Editore: Wiley
DOI: 10.1002/pssr.202200054

Density functional simulations of decomposition pathways of Ge-rich GeSbTe alloys for phase change memories

Autori: O Abou El Kheir; Daniele Dragoni; Marco Bernasconi
Pubblicato in: Physical Review Materials, 5 (9), art. no. 095004, Numero 1, 2021, ISSN 2475-9953
Editore: APS
DOI: 10.1103/physrevmaterials.5.095004

Evolution of Low‐Frequency Vibrational Modes in Ultrathin GeSbTe Films

Autori: Eugenio Zallo, Daniele Dragoni, Yuliya Zaytseva, Stefano Cecchi, Nikolai I. Borgardt, Marco Bernasconi, Raffaella Calarco
Pubblicato in: physica status solidi (RRL) – Rapid Research Letters, Numero 15/3, 2021, Pagina/e 2000434, ISSN 1862-6254
Editore: Wiley - VCH Verlag GmbH & CO. KGaA
DOI: 10.1002/pssr.202000434

Hints for a General Understanding of the Epitaxial Rules for van der Waals Epitaxy from Ge-Sb-Te Alloys

Autori: Fabrizio Arciprete; Jos Emiel Boschker; Stefano Cecchi; Eugenio Zallo; Valeria Bragaglia; Raffaella Calarco
Pubblicato in: Advanced Materials Interfaces, Numero 9, 2022, Pagina/e 2101556, ISSN 2196-7350
Editore: Wiley
DOI: 10.1002/admi.202101556

The use of photothermal techniques for thermal conductivity and thermal boundary resistance measurements of phase-change chalcogenides alloys

Autori: Jean-Luc Battaglia, Andrzej Kusiak, Kanka Ghosh
Pubblicato in: Journal of Applied Physics, Numero 129/5, 2021, Pagina/e 055106, ISSN 0021-8979
Editore: American Institute of Physics
DOI: 10.1063/5.0020983

MOCVD Growth of GeTe/Sb2Te3 Core–Shell Nanowires

Autori: Arun Kumar, Raimondo Cecchini, Claudia Wiemer, Valentina Mussi, Sara De Simone, Raffaella Calarco, Mario Scuderi, Giuseppe Nicotra, Massimo Longo
Pubblicato in: Coatings, Numero 11/6, 2021, Pagina/e 718, ISSN 2079-6412
Editore: MDPI
DOI: 10.3390/coatings11060718

Strain Relaxation in “2D/2D and 2D/3D Systems”: Highly Textured Mica/Bi 2 Te 3 , Sb 2 Te 3 /Bi 2 Te 3 , and Bi 2 Te 3 /GeTe Heterostructures

Autori: Heng Zhang, Daniel T. Yimam, Sytze de Graaf, Jamo Momand, Paul A. Vermeulen, Yingfen Wei, Beatriz Noheda, Bart J. Kooi
Pubblicato in: ACS Nano, Numero 15/2, 2021, Pagina/e 2869-2879, ISSN 1936-0851
Editore: American Chemical Society
DOI: 10.1021/acsnano.0c08842

Metrics for Quantification of By-Process Segregation in Ge-Rich GST

Autori: Petroni, E., Serafini, A., Codegoni, D., Targa, P., Mariani, L., Scuderi, M., Nicotra, G., Redaelli, A.
Pubblicato in: Frontiers in Physics, 10, art. no. 862954, 2022, ISSN 2296-424X
Editore: Frontiers Media
DOI: 10.3389/fphy.2022.862954

High‐Density Sb 2 Te 3 Nanopillars Arrays by Templated, Bottom‐Up MOCVD Growth

Autori: Raimondo Cecchini, Raja S. R. Gajjela, Christian Martella, Claudia Wiemer, Alessio Lamperti, Lucia Nasi, Laura Lazzarini, Luca G. Nobili, Massimo Longo
Pubblicato in: Small, Numero 15/37, 2019, Pagina/e 1901743, ISSN 1613-6810
Editore: Wiley - V C H Verlag GmbbH & Co.
DOI: 10.1002/smll.201901743

"Growth, Electronic and Electrical Characterization of Ge-Rich Ge–Sb–Te Alloy"

Autori: Fattorini, A. D.; Cheze, C.; Garcia, I. L.; Petrucci, C.; Bertelli, M.; Riva, F. R.; Prili, S.; Privitera, S. M. S.; Buscema, M.; Sciuto, A.; Di Franco, S.; D' arrigo, G.; Longo, M.; De Simone, S.; Mussi, V.; Placidi, E.; Cyrille, M. -C.; Tran, N. -P.; Calarco, R.; Arciprete, F.
Pubblicato in: Nanomaterials, Numero 12, 2022, Pagina/e 1340, ISSN 2079-4991
Editore: MDPI
DOI: 10.3390/nano12081340

Pulsed laser deposited stoichiometric GaSb films for optoelectronic and phase change memory applications

Autori: Daniel T. Yimam, Heng Zhang, Jamo Momand, Bart J. Kooi
Pubblicato in: Materials Science in Semiconductor Processing, Numero 133, 2021, Pagina/e 105965, ISSN 1369-8001
Editore: Pergamon Press
DOI: 10.1016/j.mssp.2021.105965

First‐Principles Study on the Crystalline Ga 4 Sb 6 Te 3 Phase Change Compound

Autori: Dario Baratella, Daniele Dragoni, Davide Ceresoli, Marco Bernasconi
Pubblicato in: physica status solidi (RRL) – Rapid Research Letters, Numero 15/3, 2021, Pagina/e 2000382, ISSN 1862-6254
Editore: Wiley - VCH Verlag GmbH & CO. KGaA
DOI: 10.1002/pssr.202000382

Metal-semiconductor transition in the supercooled liquid phase of the Ge 2 Sb 2 Te 5 and

Autori: M. Cobelli, D. Dragoni, S. Caravati, M. Bernasconi
Pubblicato in: Physical Review Materials, Numero 5/4, 2021, ISSN 2475-9953
Editore: APS Physics
DOI: 10.1103/physrevmaterials.5.045004

Mechanical characterization and properties of continuous wave laser irradiated Ge2Sb2Te5 stripes

Autori: G. D'Arrigo, M. Scuderi, A. Mio, G. Favarò, M. Conte, A. Sciuto, M. Buscema, G. Li-Destri, E. Carria, D. Mello, M. Calabretta, A. Sitta, J. Pries, E. Rimini
Pubblicato in: Materials & Design, Numero 202, 2021, Pagina/e 109545, ISSN 0264-1275
Editore: Elsevier BV
DOI: 10.1016/j.matdes.2021.109545

Interface Formation during the Growth of Phase Change Material Heterostructures Based on Ge-Rich Ge-Sb-Te Alloys

Autori: Caroline Chèze; Flavia Righi Riva; Giulia Di Bella; Ernesto Placidi; Simone Prili; Marco Bertelli; Adriano Diaz Fattorini; Massimo Longo; Raffaella Calarco; Marco Bernasconi; Omar Abou El Kheir; Fabrizio Arciprete
Pubblicato in: Nanomaterials, Numero 4, 2022, ISSN 2079-4991
Editore: MDPI
DOI: 10.3390/nano12061007

Thickness-Dependent Crystallization of Ultrathin Antimony Thin Films for Monatomic Multilevel Reflectance and Phase Change Memory Designs

Autori: Daniel Tadesse Yimam; Bart J. Kooi
Pubblicato in: Applied Materials and Interfaces, Numero 1, 2022, ISSN 1944-8244
Editore: American Chemical Society
DOI: 10.1021/acsami.1c23974

Thermal conductivity of amorphous and crystalline GeTe thin film at high temperature: Experimental and theoretical study

Autori: Kanka Ghosh, Andrzej Kusiak, Pierre Noé, Marie-Claire Cyrille, Jean-Luc Battaglia
Pubblicato in: Physical Review B, Numero 101/21, 2020, ISSN 2469-9950
Editore: APS Physics
DOI: 10.1103/physrevb.101.214305

Temperature-Dependent Thermal Conductivity and Interfacial Resistance of Ge-Rich Ge2Sb2Te5 Films and Multilayers

Autori: Kusiak, A., Chassain, C., Canseco, A.M., Ghosh, K., Cyrille, M.-C., Serra, A.L., Navarro, G., Bernard, M., Tran, N.-P., Battaglia, J.-L.
Pubblicato in: Physica Status Solidi - Rapid Research Letters, 16 (4), art. no. 2100507, 2022, ISSN 1862-6270
Editore: Wiley
DOI: 10.1002/pssr.202100507

Phase Change Ge-Rich Ge–Sb–Te/Sb2Te3 Core-Shell Nanowires by Metal Organic Chemical Vapor Deposition

Autori: Valentina Mussi; Claudia Wiemer; Raimondo Cecchini; Sara De Simone; Mario Scuderi; Massimo Longo; Raffaella Calarco; Giuseppe Nicotra; Arun Kumar
Pubblicato in: Nanomaterials, Vol 11, Iss 3358, p 3358 (2021), Numero 1, 2021, ISSN 2079-4991
Editore: MDPI
DOI: 10.3390/nano11123358

Structural and Electrical Properties of Annealed Ge2Sb2Te5 Films Grown on Flexible Polyimide

Autori: Bertelli, M., Fattorini, A.D., De Simone, S., Calvi, S., Plebani, R., Mussi, V., Arciprete, F., Calarco, R., Longo, M.
Pubblicato in: Nanomaterials, 12 (12), art. no. 2001, 2022, ISSN 2079-4991
Editore: MDPI
DOI: 10.3390/nano12122001

Phonon hydrodynamics in crystalline GeTe at low temperature

Autori: Kanka Ghosh, Andrzej Kusiak, Jean-Luc Battaglia
Pubblicato in: Physical Review B, Numero 102/9, 2020, ISSN 2469-9950
Editore: APS Physics
DOI: 10.1103/physrevb.102.094311

First-Principles Calculation of Transport and Thermoelectric Coefficients in Liquid Ge2Sb2Te5

Autori: Baratella, D., Dragoni, D., Bernasconi, M.
Pubblicato in: Phys. Status Solidi RRL2022, 2100470, 2022, ISSN 1862-6254
Editore: Wiley - VCH Verlag GmbH & CO. KGaA
DOI: 10.1002/pssr.202100470

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